2019
DOI: 10.3390/ma12030390
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Structural Controlling of Highly-Oriented Polycrystal 3C-SiC Bulks via Halide CVD

Abstract: Highly-oriented polycrystal 3C-SiC bulks were ultra-fast fabricated via halide chemical vapor deposition (CVD) using tetrachlorosilane (SiCl4) and methane (CH4) as precursors. The effects of deposition temperature (Tdep) and total pressure (Ptot) on the orientation and surficial morphology were investigated. The results showed that the growth orientation of 3C-SiC columnar grains was strongly influenced by Tdep. With increasing Tdep, the columnar grains transformed from <111>- to <110>-oriented. The arrangemen… Show more

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Cited by 15 publications
(12 citation statements)
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“…SEM images in Figure show the comparison in network morphology for the growth at 550 and 600 °C. A higher growth temperature is expected to yield a greater preference for high energy surface planes . This is seen by the increased growth of the less stable (001) and (010) planes, leading to increased density in branching with the branches that form being highly uneven along their length (see Figure , which shows the networks formed as a function of temperature).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…SEM images in Figure show the comparison in network morphology for the growth at 550 and 600 °C. A higher growth temperature is expected to yield a greater preference for high energy surface planes . This is seen by the increased growth of the less stable (001) and (010) planes, leading to increased density in branching with the branches that form being highly uneven along their length (see Figure , which shows the networks formed as a function of temperature).…”
Section: Resultsmentioning
confidence: 99%
“…A higher growth temperature is expected to yield a greater preference for high energy surface planes. 52 This is seen by the increased growth of the less stable (001) and (010) planes, leading to increased density in branching with the branches that form being highly uneven along their length (see Figure 4, which shows the networks formed as a function of temperature). This increased density in branching resulted in a less porous 2D network nanostructure at 600 °C compared to the growth at 550 °C (Figure 4).…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…In addition, wet coatings with a binder usually involve wet processes, which are relatively complicated and environmental unfriendly [19,20]. Chemical vapor deposition (CVD) of SiO 2 and atomic layer deposition (ALD) of Al 2 O 3 or TiO 2 are novel methods with promising performances using a dry process conducted in a vacuum chamber for the preparation of composite separators or electrodes [21][22][23]. However, it is necessary to seek out more eco-efficient separator coating manufacturing processes to ensure the safety of LIBS.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, non-thermally reactive atmospheric pressure plasma has attracted much attention for its simplicity and flexibility as a dry method of film deposition [23][24][25][26]. Plasma is an ionized gas composed of positive charged ions, negative charged ions, electrons, and radicals which have high reactive energy [27,28].…”
Section: Introductionmentioning
confidence: 99%
“…Spark plasma sintering (SPS) and hotisostatic pressing can be used to fabricate UHTCs with fewer sintering additives, 1) and chemical vapor deposition (CVD) can help fabricate pure UHTCs with excellent hightemperature performance. 2) However, it is difficult to fabricate large-scale materials or materials with a complicated shape by using these techniques.…”
Section: Introductionmentioning
confidence: 99%