2011
DOI: 10.1016/j.jallcom.2011.03.022
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Structural, ferroelectric and dielectric properties of In2O3:Sn (ITO) on PbZr0.53Ti0.47O3 (PZT)/Pt and annealing effect

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Cited by 24 publications
(10 citation statements)
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“…However, sample P 2 (Fig. 6(b)) indicates a normal ferroelectric behavior but the value of remnant polarization (P r = 9.5 lC/cm 2 ) was found to be much lower as compared to the typical value for PZT thin films [40]. This could be attributed to the presence of an interfacial reaction layer at the interface which offers sizable capacitance with the applied electric field.…”
Section: Resultsmentioning
confidence: 89%
“…However, sample P 2 (Fig. 6(b)) indicates a normal ferroelectric behavior but the value of remnant polarization (P r = 9.5 lC/cm 2 ) was found to be much lower as compared to the typical value for PZT thin films [40]. This could be attributed to the presence of an interfacial reaction layer at the interface which offers sizable capacitance with the applied electric field.…”
Section: Resultsmentioning
confidence: 89%
“…3d) among all the AZO/PLZT/ Pt and ITO/PLZT/Pt capacitors. Kerkache et al [6] reported a Pr of 25 and 30 lCc m -2 for ITO/PZT (PbZr 0.53 Ti 0.47 O 3 , 300 nm)/Pt capacitors at an applied electric field of 90 kV cm -1 and 100 kV cm -1 , respectively. Rao et al [31] reported a Pr of 15 lCcm -2 at 6 V for ITO/ PZT/ITO capacitors.…”
Section: Methodsmentioning
confidence: 99%
“…In addition, FeRAM has the advantage of low voltage operation and high security (Kim and Song [3], Bez and Pirovano [4]). Recently, the use of conductive oxide material has become extremely desirable in ferroelectric capacitors because it is a non-noble metal, cheap, easily etched, and because oxygen compensation and alternatives for noble metal electrodes have been studied, such as aluminum-doped zinc oxide (AZO) fabricated by pulsed laser deposition (PLD) [5], tin-doped indium oxide (ITO) fabricated by RF sputtering [6] and lanthanum-doped nickel oxide (LNO) fabricated by chemical solution deposition (CSD) [7].…”
Section: Introductionmentioning
confidence: 99%
“…In particular, BaTiO 3 , PbTiO 3 and PbZr 1−x Ti x O 3 have been extensively studied for their high dielectric constant and significant ferroelectricity [3][4][5][6][7][8]. However, these materials have drawbacks of low Curie temperature for BaTiO 3 (T C ≈ 403 K) and environmentally unfriendly element (Pb) contained in PbTiO 3 and PbZr 1−x Ti x O 3 .…”
Section: Introductionmentioning
confidence: 99%