Structural investigation of AlInN/AlN/GaN heterostructures

Mosaic Defects of AlN Buffer Layers in GaN/AlN/4H-SiC Epitaxial Structure

“…Out of plane and in-plane mismatch of crystallites in the layers are related to screw and edge type dislocations respectively [18]. Edge dislocation and screw dislocation can be calculated by using the following equations [19,20]. Here α w is the tilt angle which is a mosaic defect and b screw is the length of Burgers vector.…”