Plasma polymer coatings with embedded Ag nanoparticles were deposited in a low pressure RF plasma reactor using an asymmetrical setup with an Ag electrode. The plasma polymer was deposited from a reactive gas/monomer mixture of CO2/C2H4 yielding a functional hydrocarbon matrix. In addition, Ar was simultaneously used to sputter Ag atoms from the Ag electrode, forming nanoparticles within the growing polymer matrix. The influence of the power input, gas ratio and coating thickness on both, the Ag content and the Ag nanoparticle morphology, as well as the distribution in the polymer matrix were investigated. It was found that both increasing the power input and the CO2 ratio result in a higher incorporation of Ag into the matrix.