Structural, Morphologic, and Ferroelectric Properties of PZT Films Deposited through Layer-by-Layer Reactive DC Magnetron Sputtering

Beklešovas, Benas; Iljinas, Aleksandras; Stankus, Vytautas; Čyvienė, Jurgita; Andrulevičius, Mindaugas; Ivanov, M. V.; Banys, J.

doi:10.3390/coatings12060717

Cited by 5 publications

(3 citation statements)

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“…PZT piezoelectric thin films are widely used, which can be made by various methods, such as magnetron sputtering (A strategy for obtaining AlN, 2023), chemical vapour deposition (Beklešovas et al, 2022), molecular beam epitaxial growth, hydrothermal synthesis (Aratani et al, 2001), pulsed laser deposition (Bian et al, 2016), and sol-gel (Gatabi et al, 2017).…”

Section: Pzt Piezoelectric Filmsmentioning

confidence: 99%

Recent progress in piezoelectric thin films as self-powered devices: material and application

Song,

Hou,

Jiang

2024

Front. Mater.

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Piezoelectric materials have become a key component in sensors and actuators in many industrial fields, such as energy harvesting devices, self-powered structures, biomedical devices, nondestructive testing, owing to the novel properties including high piezoelectric coefficient and electromechanical coupling factors. Piezoelectric thin films integrated on silicon substrates are widely investigated for their high performance and low manufacturing costs to meet the requirement of sensor networks in internet of things (IoT). The aim of this work is to clarify the application and design structure of various piezoelectric thin films types, synthesis methods, and device processes. Based on latest literature, the process of fabricating thin film sensors is outlined, followed by a concise overview of techniques used in microelectromechanical systems (MEMS) processing that can integrate more complex functions to obtain relevant information in surrounding environment. Additionally, by addressing piezoelectric thin films sensors as a cutting-edge technology with the ability to produce self-powered electronic devices, this work delivers incisive conclusions on all aspects of piezoelectric sensor related features. A greater understanding of piezoelectricity is necessary regarding the future development and industry challenges.

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Section: Pzt Piezoelectric Filmsmentioning

confidence: 99%

Recent progress in piezoelectric thin films as self-powered devices: material and application

Song,

Hou,

Jiang

2024

Front. Mater.

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“…The survey spectra of the two PZT surfaces reveal prominent characteristic peaks corresponding to the Pb 4f, Zr 3d, Ti 2p, and O 1s core levels. 36 , 37 The O 1s peak observed at ∼531 eV is attributed to oxygen atoms bonded within the PZT material. 38 This peak represents the energy required to excite electrons from the 1s orbital of oxygen atoms involved in chemical bonding within the PZT lattice structure.…”

Section: Resultsmentioning

confidence: 99%

Exploring Lead Zirconate Titanate, the Potential Advancement as an Anode for Li-Ion Batteries

Bhattarai,

Shweta,

Choudhary

et al. 2024

ACS Omega

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Graphite, widely adopted as an anode for lithium-ion batteries (LIBs), faces challenges such as an unsustainable supply chain and sluggish rate capabilities. This emphasizes the urgent need to explore alternative anode materials for LIBs, aiming to resolve these challenges and drive the advancement of more efficient and sustainable battery technologies. The present research investigates the potential of lead zirconate titanate (PZT: PbZr 0.53 Ti 0.47 O 3 ) as an anode material for LIBs. Bulk PZT materials were synthesized by using a solid-state reaction, and the electrochemical performance as an anode was examined. A high initial discharge capacity of approximately 686 mAh/g was attained, maintaining a stable capacity of around 161 mAh/g after 200 cycles with diffusioncontrolled intercalation as the primary charge storage mechanism in a PZT anode. These findings suggest that PZT exhibits a promising electrochemical performance, positioning it as a potential alternative anode material for LIBs.

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“…Polarization dependence on the electric field strength (P-E loop measurements) was performed by means of the Sawyer and Tower method by supplying the created capacitor structure with up to 50 V AC sine voltages. The frequency was kept at 50 Hz during the measurements [30]. Multifunctional data acquisition (DAQ) NI USB-6361 device (National Instruments Corporation, Austin, TX, USA.)…”

Section: Methodsmentioning

confidence: 99%

Influence of the Annealing Environment on the Structure and Ferroelectric Properties of Lead Titanate Thin Films

Iljinas,

Stankus,

Marcinauskas

2023

Coatings

Self Cite

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Lead titanate thin films of pyrochlore phase were deposited using layer-by-layer reactive magnetron sputtering on a heated platinized silicon substrate. It was found that the pyrochlore phase transition to the perovskite phase was initiated at 700 °C, and the properties of the PbTiO3 films could be controlled by changing the annealing environment. The thin films annealed in air and oxygen environments (1.33 Pa) have a tetragonal structure. The highest values of remnant polarization and the coercive field were 38 μC/cm2 and 130 kV/cm, respectively, but the largest dielectric loss was determined for the films annealed in air. The remnant polarization, coercive field and dielectric loss were reduced when the annealing of films was performed using oxygen gas at 1.33 Pa pressure. The films annealed in vacuum showed a rhombohedral (and ferroelectric) structure with the lowest remnant polarization and coercive field values. Such a structure was not observed for lead titanate at room temperature. It was observed that the surface morphology strongly depended on the reaction rate, which was influenced by the oxygen concentration in the environment.

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Structural, Morphologic, and Ferroelectric Properties of PZT Films Deposited through Layer-by-Layer Reactive DC Magnetron Sputtering

Cited by 5 publications

References 50 publications

Recent progress in piezoelectric thin films as self-powered devices: material and application

Recent progress in piezoelectric thin films as self-powered devices: material and application

Exploring Lead Zirconate Titanate, the Potential Advancement as an Anode for Li-Ion Batteries

Influence of the Annealing Environment on the Structure and Ferroelectric Properties of Lead Titanate Thin Films

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