Structural, optical and electrical properties of amorphous carbon films deposited by pulsed unbalanced magnetron sputtering

Dai, Huanyun; Cheng, Xue Rui; Wang, C.F.; Xue, Yonggang; Chen, Z.P.

doi:10.1016/j.ijleo.2015.02.047

Cited by 21 publications

(14 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 7 depicts the measurement results of the optical band gap and the relationships with the sp 3 ratio of NEXAFS (a) and hydrogen content (b). The optical band gap is plotted between 0.17 and 1.78 eV, in good agreement with 1.5–1.9 eV [ 87 ] and 1.6–2.1 eV [ 88 ] in the previous study. The correlation coefficients were 0.258 and 0.402, respectively.…”

Section: Analysis and Testing Resultssupporting

confidence: 86%

Properties and Classification of Diamond-Like Carbon Films

Hiratsuka²,

et al. 2021

View full text Add to dashboard Cite

Diamond-like carbon (DLC) films have been extensively applied in industries owing to their excellent characteristics such as high hardness. In particular, there is a growing demand for their use as protective films for mechanical parts owing to their excellent wear resistance and low friction coefficient. DLC films have been deposited by various methods and many deviate from the DLC regions present in the ternary diagrams proposed for sp3 covalent carbon, sp2 covalent carbon, and hydrogen. Consequently, redefining the DLC region on ternary diagrams using DLC coatings for mechanical and electrical components is urgently required. Therefore, we investigate the sp3 ratio, hydrogen content, and other properties of 74 types of amorphous carbon films and present the classification of amorphous carbon films, including DLC. We measured the sp3 ratios and hydrogen content using near-edge X-ray absorption fine structure and Rutherford backscattering-elastic recoil detection analysis under unified conditions. Amorphous carbon films were widely found with nonuniform distribution. The number of carbon atoms in the sp3 covalent carbon without bonding with hydrogen and the logarithm of the hydrogen content were inversely proportional. Further, we elucidated the DLC regions on the ternary diagram, classified the amorphous carbon films, and summarized the characteristics and applications of each type of DLC.

show abstract

Section: Analysis and Testing Resultssupporting

confidence: 86%

Properties and Classification of Diamond-Like Carbon Films

Hiratsuka²,

et al. 2021

View full text Add to dashboard Cite

show abstract

“…Besides, the continuous bombardment can also cause the heating effect on the film/substrate which is beneficial to the formation of sp 2 clusters and grain coarsening, leading to the higher surface roughness [47,48]. Chen et al [46] and Laugier et al [49] also reported with the increase of temperature the sp 2 content in amorphous carbon films by magnetron sputtering firstly decreased and then increased when the temperature improved to a critical value. Thus, the increase of sp 2 content, grain size and surface roughness can be attributed to the synergistic effects of the higher mobility of the deposited atoms and heating effects with the extension of deposition time.…”

Section: The Microstructure Evolution Of Glc Filmsmentioning

confidence: 98%

“…Although the extra energy carried by the implanted C + may be beneficial to the transformation from sp 2 to sp 3 at relative lower energy range, thermalization and relaxation can take place at higher energies allowing the excess density to relax to zero, and cause a loss of sp 3 bonding at higher ion energies [46]. Meanwhile, the deposition rate increased with the relaxation of the subplanted carbon atoms to the surface with the rise of the deposition time.…”

Section: The Microstructure Evolution Of Glc Filmsmentioning

confidence: 99%

Tribological performance of graphite-like carbon films with varied thickness

Shi

Liskiewicz

Beake

et al. 2020

Tribology International

View full text Add to dashboard Cite

Graphite-like carbon (GLC) films with different thickness were deposited on 316L stainless steel using closed field unbalanced magnetron sputtering system to investigate the influence of film thickness on the microstructure, mechanical and tribological properties. The results showed that the surface of the deposited films exhibits granularlike morphology, the sp 2 content, surface roughness increase with the increase of film thickness, leading to the lower of hardness and higher of the internal stress. Both of the of friction curves obtained by nano-tribological tests and fretting wear experiments revealed a three-stage evolution tendency with the same wear mechanism for the first two stages. The intermediate thickness GLC film had the lowest specific wear rate, whilst the fretting fatigue life increased with film thickness.

show abstract

“…Magnetron sputtering (MS) is one of the most common methods to fabricate a variety of thin films with specific properties appropriate for industrial applications [1][2][3][4][5][6][7]. Unbalanced magnetron sputtering (UMS) and closed field unbalanced magnetron sputtering (CFUMS) are a step forward of classical MS in which they provide higher deposition rate, denser and more spacious plasma expanded to the substrate while the quality of thin films is also enhanced [6,8,9]. The enhancement of thin films quality is strongly connected to the ratio of the ion to atom transported into the substrate [10,11], in which they not only have enough kinetic energy to be located on the thermodynamically lower energy place but also they can kick off loosely bonded atoms from the substrate surface, providing the negative bias voltage is applied.…”

Section: Introductionmentioning

confidence: 99%

The experimental approach into the influence of external inductance on the discharge characteristic of HiPIMS

et al. 2019

View full text Add to dashboard Cite

The main objective of the current paper is to describe the effect of external inductance (EI) on the current discharge waveforms of HiPIMS at different pulse-on time (P on) and its relation with static deposition rate and topographical properties of deposited titanium thin films, which is investigated by scanning electron microscope and atomic force microscope. It has shown that the higher the EI, independent of the P on , the higher the peak power is. The delay time also extensively increases when an EI is implemented into the circuit. However, the rise time does not have a linear dependency with the EI and its behavior changes to some extent at different P on. By increasing the EI from zero to 30 mH at P on = 60 μs, the peak power subsequently rises from 11 to 32 kW at constant time-average power. Meanwhile, the deposition rate decreases from 8.5 to 1.5 nm/min, which is mainly attributed to the metal ions return to the target surface and nonlinear dependency of sputtering yield with applied voltage. It was also revealed that the higher peak power has no special effect on the surface roughness of titanium thin films deposited by HiPIMS.

show abstract

Structural, optical and electrical properties of amorphous carbon films deposited by pulsed unbalanced magnetron sputtering

Cited by 21 publications

References 18 publications

Properties and Classification of Diamond-Like Carbon Films

Properties and Classification of Diamond-Like Carbon Films

Tribological performance of graphite-like carbon films with varied thickness

The experimental approach into the influence of external inductance on the discharge characteristic of HiPIMS

Contact Info

Product

Resources

About