Structural study of porous silicon

Bayliss, S. C.; Hutt, D.A.; Zhang, Q.; Harris, Peter; Phillips, Nicholas J.; Smith, Andy

doi:10.1016/0040-6090(94)05679-8

Cited by 15 publications

(6 citation statements)

References 7 publications

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“…This is consistent with a quantum confinement interpretation of the P L data [8]. Finally, TEM and SPM have both shown evidence for surface modifications in the NH,F : HF-based porous silicon, indicative of selective etching of Si(100) surfaces to produce Si(ll1) terminated regions [5].…”

Section: Microscopysupporting

confidence: 55%

“…The near-edge (NEXAFS) region is very useful for characterisation of the chemical environments, LIMA data has also given evidence for the presence of silicon bonded to hydrogen and for silicon bonded to silicon in HF-etched porous silicon [4, 51, by comparison with data from standard samples of c-Si, a-Si, and SiO,. LIMA indicates the presence of many F-based species in the NH,F : HF-etched material : the reflected EXAFS of NH,F : HF-based porous Si contains several features in between the 'surface' and 'bulk' regions [5], additional to those characteristic of Si-Si and Si-0 bonded material. It has not been possible, however, to assign these features unambiguously.…”

Section: Local Structurementioning

confidence: 99%

“…On annealing at 800 "C for 20 to 30 min in a N, atmosphere the films were found to emit in the blue or blue-green, and this emission was visible to the naked eye under excitation by ~0 . 5 pW of 300 nm (or 3 pW of 370 nm) [7]: The tuneable excitation used for PLE was the ultraviolet radiation from the Daresbury Laboratory synchrotron source, where the bandwidth was = 10 nm.…”

Section: Sample Preparationmentioning

confidence: 99%

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From Porous Silicon to Clustered Matrices: A Comparison of Local Structures

Bayliss

Zhang

Hutt

1995

Physica Status Solidi (b)

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(Received M a y 22, 1995)Studies have been made of the local atomic structure ofclustered and porous silicon nanostructures, with the object of obtaining more information on the environments which exist in highly PL-efficient material. In some structures the Si environments can be interpreted in terms of a small crystalline core surrounded by configurationally disordered material. Finally, although the details of the individual mechanisms responsible for the emission appear to be different for clustered and porous material, the overall behaviour can be linked t o the sizes and dimensionality of the units involved.

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Section: Microscopysupporting

confidence: 55%

Section: Local Structurementioning

confidence: 99%

Section: Sample Preparationmentioning

confidence: 99%

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From Porous Silicon to Clustered Matrices: A Comparison of Local Structures

Bayliss

Zhang

Hutt

1995

Physica Status Solidi (b)

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“…While much research has been focused on characterising electrochemically produced PS from Si wafers [9][10][11][12] little has been published on characterising the resulting pore structures and porosity of chemically etched Si particles. This is due to the ease at which pore structures in Si wafers can be achieved and tailored through electro-chemical etching [13] and the microscopical analysis and characterisation of the resultant material has been well documented [14].…”

Section: Successful Characterisation Of Ps Involves Using a Host Of Amentioning

confidence: 99%

Microstructural characterisation of metallurgical grade porous silicon nanosponge particles

2011

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Porous silicon finds numerous applications in the areas of bio-technology, drug delivery, energetic materials and catalysis. Recent studies by Vesta Sciences have led to the development of porous silicon nanosponge particles from metallurgical grade silicon powder through their own patented chemical etching process (Irish patent no. IE20060360). This discovery paves the way for a more economical production method for porous silicon. The work presented here studies the structural morphology of the porous silicon nanosponge particles using high resolution electron microscopy techniques combined with porisometry type measurements where appropriate. The related surface pore structure is examined in detail using Scanning Electron Microscopy and Transmission Electron Microscopy techniques while the internal pore structure is explored using Focused Ion Beam milling and ultramicrotomed cross-sections. Three samples of the silicon particles were analysed for this study which include the starting metallurgical grade silicon powder and two samples that have been chemically etched. Analysis of the etched samples indicates a disordered pore structure with pore diameters ranging up to 15nm on porous silicon particles ranging up to 5µm in size. Crystallographic orientation did not appear to affect the surface pore opening diameter. Internal pore data indicated pore depths of up to 1 µm dependant on the particle size and etching conditions applied.

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“…Much experience has been accumulated on preparation of luminescent PS by this technique. 2 The generally accepted mechanism of anodization is shown in Fig. 1.…”

Section: Introductionmentioning

confidence: 99%

Structured luminescent silicon produced with laser-assisted etching

Starovoitov

Bayliss

1998

Appl. Organometal. Chem.

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We present an investigation into a new technique for producing luminescent porous silicon with controlled lateral microstructure. The process is based on the effect of laser‐assisted stain etching of silicon with hydrofluoric acid solution. With the further goal of preparing two‐dimensional periodical arrays of luminescent microdots, we studied the accuracy of the technique by etching single submillimetre structures with a low‐power laser. The size and exact position of the etched area are controlled by laser focusing and movement, respectively, with submillimetre accuracy. Samples exhibit orange luminescence when illuminated with UV or blue light. We have studied the dependence of the efficiency of the luminescence, the structure and the rate of etching on parameters such as the HF concentration, the intensity and wavelength of illumination and the doping level of the silicon wafer. Optimization of the process parameters, and consistency with assumed mechanisms of luminescence and etching process, are discussed. © 1998 John Wiley & Sons, Ltd.

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Structural study of porous silicon

Cited by 15 publications

References 7 publications

From Porous Silicon to Clustered Matrices: A Comparison of Local Structures

From Porous Silicon to Clustered Matrices: A Comparison of Local Structures

Microstructural characterisation of metallurgical grade porous silicon nanosponge particles

Structured luminescent silicon produced with laser-assisted etching

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