1984
DOI: 10.1143/jjap.23.l846
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Structure Analysis of Oval Defect on Molecular Beam Epitaxial GaAs Layer by Cross-Sectional Transmission Electron Microscopy Observation

Abstract: The fine structure of a surface defect on GaAs grown by molecular beam epitaxy (MBE) is analyzed by transmission electron microscopy (TEM) observing cross-sectional views of the specimen. The defect has a pyramid structure consisting of four {111} stacking fault planes whose Burgers vectors are a 0/6 <112>, a 0/6 <1̄12>, a 0/6 <11̄2> and a 0/6 <\overline112>. Because a defect of this type always starts at the GaAs s… Show more

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Cited by 40 publications
(11 citation statements)
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“…Stacking fault (SF) structures can grow from the substrate-epilayer interface during epitaxial growth [33,47]. In the present work, SFs form in a 10 µm GaAs layer grown by molecular beam epitaxy with room temperature electron density n ∼ 1.9 × 10 14 cm −3 and mobility ∼ 7400 cm 2 /Vs.…”
Section: S1 Stacking Fault Formationmentioning
confidence: 88%
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“…Stacking fault (SF) structures can grow from the substrate-epilayer interface during epitaxial growth [33,47]. In the present work, SFs form in a 10 µm GaAs layer grown by molecular beam epitaxy with room temperature electron density n ∼ 1.9 × 10 14 cm −3 and mobility ∼ 7400 cm 2 /Vs.…”
Section: S1 Stacking Fault Formationmentioning
confidence: 88%
“…Using a wavefunction size of approximately 10 nm, the critical density for exciton overlap in the 2D potential is 10 000 µm −2 . Therefore, the SF- Stacking fault (SF) structures can grow from the substrate-epilayer interface during epitaxial growth [33,47]. In the present work, SFs form in a 10 µm GaAs layer grown by molecular beam epitaxy with room temperature electron density n ∼ 1.9 × 10 14 cm −3 and mobility ∼ 7400 cm 2 /Vs.…”
mentioning
confidence: 86%
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“…Oval defects have been extensively studied in films grown by MBE, and are often associated with the Ga source due to spitting or oxide formation, but can also arise from substrate contamination or particulate transfer [34][35][36][37][38][39]. Oval defects have been previously reported in CSVT GaAs grown from single-crystal wafer sources and were attributed to surface contamination of the substrate prior to growth [29].…”
Section: Origin Of Surface Defectsmentioning
confidence: 99%
“…[4] for details. The stacking fault defects nucleate at the substrate-epilayer interface during epitaxial growth [5], [6]. Two kinds of defects are observed, see Fig.…”
Section: A Sample Preparationmentioning
confidence: 99%