Structure and control strategy for a piezoelectric inchworm actuator equipped with MEMS ridges

Shao, Shubao; Song, Siyang; Chen, Nan; Xu, Minglong

doi:10.1016/j.sna.2017.07.053

Cited by 31 publications

(17 citation statements)

References 21 publications

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“…One of the longstanding issues with inchworm technology is that actuation of the brakes causes unintended motion of the moved element. This phenomenon has been reported and characterized by other researchers such as [6,[8][9][10]. The JPL FIA mechanism is no exception.…”

Section: Introductionsupporting

confidence: 74%

“…These PZTs are used to grasp and move a runner attached to the optic to be moved. By adjusting preload rods, each brake can be configured for either a power-off or power-on parked state, which is a feature that has not been seen in previous brake designs, such as those mentioned in [6,[8][9][10] which are all power-off brakes. The advantage of power-on brakes is that the holding force is generally greater than relying on the compliance of the mechanism to hold the actuator in place.…”

Section: Introductionmentioning

confidence: 99%

“…Regarding control design for inchworm actuators, few if any publications cover this. The efforts in [10] are notable but they only consider feedforward compensation of the driver PZT hysteresis. Traditional feedback control is not used and addressing the issue of brake disturbances is not mentioned.…”

Section: Introductionmentioning

confidence: 99%

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Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Shields

2019

Actuators

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Inchworm actuators are innovative mechanisms that offer nanometer-level positioning coupled with extreme dynamic range. Because of this, they have found applications in optical instruments of various types including interferometers, segmented reflectors, and coronagraphs. In this paper, we present two prototypes of flight-qualifiable inchworm actuators developed at the Jet Propulsion Laboratory. These actuators have two sets of brake piezoceramic (PZT) stacks and an extension PZT stack used for mobility. By proper phasing of the signals to these PZTs, a walking gait can be achieved that moves a runner attached via a flexure to the optic to be moved. A model of these devices, based on first principles, is developed as well as an estimation and control scheme for precise positioning. The estimator estimates physical parameters of the device as well as a self-induced motion disturbance caused by the brakes. Simulations and test data are presented that demonstrate nanometer-level positioning precision as well as the cause of variations in the brake-induced disturbance.

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Section: Introductionsupporting

confidence: 74%

Section: Introductionmentioning

confidence: 99%

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Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Shields

2019

Actuators

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“…However, the amplification mechanisms make the structure complex, and the stroke is hard to beyond one hundred micrometers. The working principles determine that the inchworm actuators and stick-slip actuators have infinite stroke [18][19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

A novel stick-slip based linear actuator using bi-directional motion of micropositioner

Guo

Tian

Zhang

et al. 2019

Mechanical Systems and Signal Processing

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A stick-slip based linear actuator was proposed in this paper, which applied the axial motion of the micropositioner to adjust the preload, and the lateral motion to drive the slider. The bi-directional motion of the micropositioner was realized through the asymmetric structure of a flexure-based mechanism, which includes two right circular flexure hinges and four leaf-spring flexure hinges. The static analysis, kinematic analysis and optimization design were successively implemented on the flexure-based mechanism. The Finite Element Analysis (FEA) proved the flexure-based mechanism could generate the bi-directional motion as designed. A prototype of the linear actuator was developed and the measuring system was constructed. A modified sawtooth wave with a cycloid fall curve was designed to improve the output property. The experimental results showed the modified sawtooth wave generated larger velocity than the traditional sawtooth wave in same driving voltages, fall times, driving frequencies and loads. The amplification coefficient and resolution of the proposed linear actuator in single step were 3.16 and 60 nm, respectively. The maximal velocity was 26.2 mm/s with the modified sawtooth wave in driving frequency of 500 Hz.

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“…AIC has been applied successfully in several practical applications such as real-time blood pressure control, shock testing, control of the kiln, real-time control of temperature of a heating process, real-time speed control of a brush DC motor, nonlinear ship maneuvering, echo cancelation, and noise cancelation [1,[15][16][17][18][19][20]. Recently, AIC is used to control the position of piezoelectric inchworm actuator [21] and the acceleration of six-degree-of-freedom electrohydraulic shaking table [22].…”

Section: Introductionmentioning

confidence: 99%

Stability and Convergence Analysis of Direct Adaptive Inverse Control

Shafiq

Yousef

2017

Complexity

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In adaptive inverse control (AIC), adaptive inverse of the plant is used as a feed-forward controller. Majority of AIC schemes estimate controller parameters using the indirect method. Direct adaptive inverse control (DAIC) alleviates the adhocism in adaptive loop. In this paper, we discuss the stability and convergence of DAIC algorithm. The computer simulation results are presented to demonstrate the performance of the DAIC. Laboratory scale experimental results are included in the paper to study the efficiency of DAIC for physical plants.

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Structure and control strategy for a piezoelectric inchworm actuator equipped with MEMS ridges

Cited by 31 publications

References 21 publications

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

A novel stick-slip based linear actuator using bi-directional motion of micropositioner

Stability and Convergence Analysis of Direct Adaptive Inverse Control

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