Structure and electrical characteristics of RF magnetron sputtered MgTiO3

Huang, Cheng Liang; Chen, Yuan Bin

doi:10.1016/j.surfcoat.2005.07.045

Cited by 14 publications

(16 citation statements)

References 13 publications

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“…The lms' RMS roughness enhanced with an increase of O 2 in the O 2 /Ar ratio due to better crystallization and larger grain size. Thus, it is substantiated that the improvement in the MZT lms' crystallinity is accompanied by an increase in surface roughness and grain size[10]. The observed surface roughness values of the MZT lms are lower than the parent MgTiO 3 lms reported earlier[6,10,11,12].…”

supporting

confidence: 58%

“…Thus, it is substantiated that the improvement in the MZT lms' crystallinity is accompanied by an increase in surface roughness and grain size[10]. The observed surface roughness values of the MZT lms are lower than the parent MgTiO 3 lms reported earlier[6,10,11,12]. The obtained lower RMS roughness of MZT lm is suitable for optical devices as they require smoother surfaces.…”

supporting

confidence: 56%

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Dielectric Properties and Impedance Spectroscopy of RF Sputtered Nanocrystalline (Mg0.95Zn0.05)TiO3 Films for Electronic Applications

Gogoi¹,

Pr²,

Ka³

et al. 2021

Preprint

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Oxide thin films attracted significant attention because of their favorable responses, especially dielectric and stable electrical properties. In this study, nanocrystalline (Mg0.95Zn0.05)TiO3 (MZT) films are deposited on Pt/TiO2/SiO2/Si and quartz substrates by radio-frequency (RF) reactive magnetron sputtering. The effect of deposition gas ratio, i.e., the proportion of oxygen and argon (O2/Ar) on broad band and microwave dielectric properties and impedance spectroscopy of MZT films are investigated. The dielectric properties showed a wide range of variation with the different O2/Ar ratios. The MZT film deposited in a pure oxygen environment showed the best dielectric properties, and the plasma survived which shows that the target is not fully oxidized. The impedance spectroscopy of the film deposited under a pure oxygen environment exhibited the single semi-circular arc. The Ag/ MZT/Pt thin films capacitors exhibited the best dielectric constant with low loss tangent. The microwave dielectric constant measured at different spot frequencies in the GHz range displayed inferior dielectric response as compared to their bulk counterparts. An equivalent circuit model to explain the Nyquist plots of MZT films are worked out. The observed electrical and dielectric characteristics of the thin films suggest interesting applications in dielectric mirror and integrated circuits.

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supporting

confidence: 58%

supporting

confidence: 56%

Dielectric Properties and Impedance Spectroscopy of RF Sputtered Nanocrystalline (Mg0.95Zn0.05)TiO3 Films for Electronic Applications

Gogoi¹,

Pr²,

Ka³

et al. 2021

Preprint

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show abstract

“…Magnesium titanate (MgTiO 3 ) is a well-known microwave dielectric ceramic material with wide applications such as in capacitors, resonators, filters, antennas for communication, radar, direct broadcasting satellite and global positioning system operating at microwave frequencies [1][2][3][4]. In order to control the combined dielectric properties of a high dielectric constant, a low dielectric loss and a near zero temperature coefficient of resonant frequency, it is necessary to produce MgTiO 3 powders with the highest possible purity, well-defined particle morphology, and small particle size distribution.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of tetragonal flake-like magnesium titanate nanocrystallites

Kang

Wang

Xue

et al. 2008

Journal of Alloys and Compounds

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“…However, the growing environment concerns on lead and the usually complex compositions of the solid solutions being used are the two major drawbacks of the lead-containing ferroelectric capacitors. In order to minimize the environmental impact and promote a manufacturing-friendly preparation process, single component lead-free perovskites have been investigated by several research groups for applications in thin film dielectric capacitors [ 10 , 11 , 12 , 13 , 14 ]. Among them, BiFeO 3 and BaTiO 3 films are most popular candidates [ 13 , 14 ].…”

Section: Introductionmentioning

confidence: 99%

Energy Storage Characteristics of BiFeO3/BaTiO3 Bi-Layers Integrated on Si

et al. 2016

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BiFeO3/BaTiO3 bi-layer thick films (~1 μm) were deposited on Pt/Ti/SiO2/(100) Si substrates with LaNiO3 buffer layers at 500 °C via a rf magnetron sputtering process. X-ray diffraction (XRD) analysis revealed that both BiFeO3 and BaTiO3 layers have a (00l) preferred orientation. The films showed a small remnant polarization (Pr ~ 7.8 μC/cm2) and a large saturated polarization (Ps ~ 65 μC/cm2), resulting in a slim polarization-electric field (P-E) hysteresis loop with improved energy storage characteristics (Wc = 71 J/cm3, η = 61%). The successful “slim-down” of the P-E loop from that of the pure BiFeO3 film can be attributed to the competing effects of space charges and the interlayer charge coupling on charge transport of the bi-layer film. The accompanying electrical properties of the bi-layer films were measured and the results confirmed their good quality.

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Structure and electrical characteristics of RF magnetron sputtered MgTiO3

Cited by 14 publications

References 13 publications

Dielectric Properties and Impedance Spectroscopy of RF Sputtered Nanocrystalline (Mg0.95Zn0.05)TiO3 Films for Electronic Applications

Dielectric Properties and Impedance Spectroscopy of RF Sputtered Nanocrystalline (Mg0.95Zn0.05)TiO3 Films for Electronic Applications

Synthesis of tetragonal flake-like magnesium titanate nanocrystallites

Energy Storage Characteristics of BiFeO3/BaTiO3 Bi-Layers Integrated on Si

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