Herein, the synthesis, structure, thermal stability, and magnetic properties of Ni 4 N thin films are studied. Ni 4 N is difficult to synthesize in the correct chemical order and stoichiometry due to unfavorable thermodynamics. During the synthesis of Ni-N thin films, it is found that the substrate temperature (T s) is a critical parameter affecting the growth of a Ni 4 N phase. The Ni 4 N phase transforms into an amalgamation of [NiþNi 3 N] phases even if the T s rises just above 300 K. These results elucidate a correlation between atomic diffusion and T s. N self-diffusion measurements carried out using secondary-ion mass spectroscopy indicate that substantial N self-diffusion is occurring at low T s. A comparison of N self-diffusion coefficients in Fe-N, CoN , and Ni-N indicates that N self-diffusion in Ni-N lies between that of Fe-N and CoN and exhibits a greater correlation with the enthalpy of formation. A transformation from the cubic-to-tetragonal deformation in the Ni 4 N crystal lattice as a function of increasing N concentration is evident from the X-ray diffraction and X-ray absorption near-edge spectroscopy measurements. Magnetization measurements confirm a nonferromagnetic state of Ni 4 N at 300 K, which transforms into a ferromagnetic state at 15 K.