Structure and mechanical properties of Cr–Zr–N films synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources

Kim, GwangSeok; Kim, BomSok; Lee, Sang-Yul; Hahn, Junhee

doi:10.1016/j.surfcoat.2005.08.101

Cited by 74 publications

(77 citation statements)

References 13 publications

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“…Hybrid material systems consisting of one hard and one relatively soft phase have attracted considerable attention in the design of hard, yet tough, coatings [3][4][5][6][7][8]. For example, M 1 N-M 2 systems, where M 1 N represents hard transition metal nitrides e.g.…”

Section: Introductionmentioning

confidence: 99%

“…in the CrNiN and CrZrN systems [3,8], more specifically the (200) orientation for CrN became dominant [3,4]. Regent and Musil [4] showed that the preferred (200) orientation in these films became stronger when the films were deposited with the substrate heated to 200 o C, leading to a higher microhardness compared to films deposited at room temperature.…”

Section: Introductionmentioning

confidence: 99%

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Enhancing toughness of CrN coatings by Ni addition for safety-critical applications

Munroe

Jiang

et al. 2014

Materials Science and Engineering: A

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CrN is one of the most important transition metal nitrides, used as protective and anti-wear coating in modern engineering applications. However, CrN coatings are typically brittle and susceptible to catastrophic failure. In this paper, CrNiN coatings with differing Ni contents were deposited on tool steel substrates using a closed field unbalanced magnetron sputtering system. The effects of Ni addition on the microstructure and mechanical characteristics of CrN thin films were studied by combining nanoindentation tests with cross-sectional transmission electron microscopy. A columnar structure was observed in the CrN coating. With an increase in Ni content, the resultant columnar grains exhibited a high aspect ratio. Ni additions to CrN were

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Enhancing toughness of CrN coatings by Ni addition for safety-critical applications

Munroe

Jiang

et al. 2014

Materials Science and Engineering: A

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“…The peak positions for some major orientations of the Cr-Zr-N materials as a function of the Zr/Cr ratio have been calculated and presented elsewhere. 4) Here, according to EDS results, the composition of the material becomes stable after a 20% nitrogen partial pressure was applied and exhibits a pattern similar to the Cr 0:7 Zr 0:3 N form in the ICDD 03-065-9004 database, with a NaCl-like structure. The Cr 0:7 Zr 0:3 N(200) form starts to develop from a nitrogen partial pressure of 15%, whilst the (200) plane is the preferable orientation when formed over and above a 15% nitrogen partial pressure because of the dominant surface energy.…”

Section: Chemical Compositionmentioning

confidence: 65%

“…1,2) Adding one more metal element to form Cr-based ternary nitride films has been reported to show improved properties compared to the binary CrN compound. [3][4][5] However, in the case of Zn, as an example added tertiary metal element, there is an apparent lack of important information about the properties of the ternary Cr-Zr-N films derived from various growth parameters, despite the fact that these are the key variables for engineering the desired properties of the material. In this work, we explored the role of the nitrogen partial pressure during film formation, and that of the post-process annealing temperature, on the structural, mechanical and electrical properties of the resultant Cr-Zr-N film.…”

Section: Introductionmentioning

confidence: 99%

Growth and Structural Characterizations of Nanostructured Chromium-Zirconium-Nitride Thin Films for Tribological Applications

Homhuan

Chaiyakun²,

Thonggoom

et al. 2010

Mater. Trans.

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Nanostructured Cr-Zr-N thin films were grown on Si(100) substrates in a mixture of Ar and N 2 plasma. The nitrogen partial pressure was varied to produce and control the stoichiometric forms obtained. All the Cr-Zr-N films exhibited a nanostructure with an average grain size of less than 10 nm, as determined by X-ray diffractogram analysis, and were formed in the solid-solution. As the contents of nitrogen in the film increased, it lead to changes in the crystal texture and competitive growth. The maximum root mean square roughness was 7.87 nm at a 20% nitrogen partial pressure and the roughness tended to decrease as the grain size decreased. The nano-indentation showed that the films grown at a 20% nitrogen partial pressure and annealed at 700 C had the highest reduced modulus and hardness at 349.2 and 35.1 GPa, respectively. The mechanical properties of films can be improved by a post-annealing heat treatment. With respect to the electrical properties of these films, the sheet resistance, which is related to the defect level, tended to increase as the nitrogen partial pressure increased.

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“…The performance of such coatings can be further improved by doping a third metal or nonmetal element into the CrN-based coatings, such as Al [3,9], Mo [10], Zr [11], Cu [12], C [13], Si [14] and Al-Si [15,16] elements. These elements have all been previously used to modify the structures and properties of the CrN coatings.…”

Section: Introductionmentioning

confidence: 99%

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

et al. 2017

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CrN and Cr-Al-Si-N coatings were deposited on SUS304 and Si-wafers by a hybrid coating system. The Cr and Al-Si target were connected to the cathode arc ion plating (AIP) and high power impulse magnetron sputtering (HiPIMS), respectively. Various Al and Si contents in the coatings were obtained by changing the power of Al-Si target from 0 to 1 kW. The results demonstrated a face-centered cubic structure in all of the coatings. With increasing Al-Si target power, both the density and mean diameter of the macroparticles on the coating surface declined. As Al and Si contents increased, the microstructure of the Cr-Al-Si-N coatings evolved from a dense column structure, to a finer grain column structure, and then to a compact granular-like structure. The hardness of the coatings increased from 21.5 GPa for the pure CrN coating, to a maximum value of~27 GPa for the Cr-Al-Si-N coating deposited at 0.4 kW, which was mainly attributed to the solid solution strengthening and increased residual stress. The addition of Al and Si contents led to enhanced wear resistance against alumina balls at both room and elevated temperatures. Meanwhile, the Cr-Al-Si-N coatings also exhibited an excellent resistance to high-temperature oxidation at 800 and 1000 • C, and improved corrosion resistance, as compared with CrN coatings.

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Structure and mechanical properties of Cr–Zr–N films synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources

Cited by 74 publications

References 13 publications

Enhancing toughness of CrN coatings by Ni addition for safety-critical applications

Enhancing toughness of CrN coatings by Ni addition for safety-critical applications

Growth and Structural Characterizations of Nanostructured Chromium-Zirconium-Nitride Thin Films for Tribological Applications

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

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