1987
DOI: 10.1007/bf01161479
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Structure and optical properties of thin titanium films deposited on different substrates

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Cited by 14 publications
(8 citation statements)
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“…S3: Transmisssion vs metal thickness for Al and Ti extracted from Ref. 3 . The dashed line for Al is a linear guide for the eye, while the dashed for Ti is the bulk absorption coefficient from Ref.…”
Section: Optical Transmission Through Metal Contactmentioning
confidence: 99%
“…S3: Transmisssion vs metal thickness for Al and Ti extracted from Ref. 3 . The dashed line for Al is a linear guide for the eye, while the dashed for Ti is the bulk absorption coefficient from Ref.…”
Section: Optical Transmission Through Metal Contactmentioning
confidence: 99%
“…This is reasonable as the optical constants of materials in the form of thin films are usually slightly, and often considerably different from those of corresponding bulk materials. [28] In addition, it has been found that the optical properties of evaporated films thicker than 20-30 nm [27] are nearly identical to those of bulk materials. The optical dispersion models used for fitting the dielectric functions of SiO 2 , the Ti layer, and the Au layer are the Cauchy, Lorentz, and Lorentz models, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The aim of this work is to examine the influence of the thickness of titanium films (from 12 nm to 1470 nm) formed using the GIMS method on their microstructure, optical and electrical properties. It should be noted that microstructural properties of Ti coatings prepared under different conditions and using various modifications of magnetron sputtering methods are described in literature [2][3][4][5][6][7][18][19][20][21]; however, their optical constants and/or opto-electronic properties are described only in a few publications [20,[22][23][24]. Additionally, the results related to the optical constants of Ti can b found in Reference [12,14,15].…”
Section: Introductionmentioning
confidence: 99%