“…To date, there have been several theoretical calculations predicting energy levels for acceptor-like gallium vacancies and donor-like oxygen vacancies that are close to the experimentally observed deep levels here. [35][36][37][38][39] Hydrogen-gallium vacancy complexes (i.e., V Ga -H, V Ga -2H) might also play a role since irradiation can affect the degree of H saturation of V Ga with different charge state transitions, (0/−1), (−1/−2), (−2/−3), etc., which has also been reported for proton-implanted β-Ga 2 O 3 with the V Ga -2H complex formation, 44 and possibly cause Frenkel pair generation. 39,45 Regarding the E C −4.48 eV state that remained unaffected after irradiation for both doses, this energy level is close to those that have been predicted for vacancies; 38,46 however, Note that the concentrations of the DLOS traps before and after irradiation are likely even greater (but at same ratio) than shown here due to their small optical cross sections causing an underestimation of these values.…”