“…In this case, the main factors that affect the formation of the structure, composition, and properties of film coatings are the deposition temperature and energy of film forming particles [17]. Highly textured overstoichio metric transition metal diboride films CrB 2 , HfB 2 , TaB 2 , and TiB 2 exhibit superhardness H V equal to 43.9 [7][8][9], 44 [6,14,15], 43.9 [12,13], and 48.5 [5] GPa compared to those equal to 33, 36, 35, and 37 GPa for stoichiometric compositions, respectively.…”