The structures of the multilayered thin films of hydrocarbon molecules, which are n-C 23 H 48 (C23), n-C 25 H 52 (C25), and n-ClC 20 H 40 Cl (C20Cl), have been investigated by means of X-ray diffraction. The alternatively layered thin films of two hydrocarbon molecules, the C23/C25/C23/C25/Si, C23/C25/Si, C25/C20Cl/Si, and C20Cl/C25/Si films, were prepared by vacuum evaporation on the Si substrate. The multilayered structural parameters, which are the chain length in each layer, the number of molecule in a layer, the layer thickness, the total film thickness, and the interface structure between different layers are determined from X-ray scattering profiles by using the multilayered model. The obtained parameters are considered to agree with those determined by other techniques. It is concluded that the interface between the different layers of the multilayered films except the C25/C20Cl/Si film are smooth. While in the case of the C25/C20Cl/Si film, the interface structure is disordered. The different deposition sequence leads to difference in interface structure.