“…State-of-the-art programmable SLMs have emerged as a boon, as these possess excellent capability to produce orientation change, and flexible structured illumination patterns, thereby replacing the use of etched gratings, masks, and interference beams for structured illumination. For some of the SIM techniques based on mask/grating [37,39,66,76,83,150], interference [38,77], the use of diffractive optical elements [171], subwavelength hole arrays [172], and SLMs [79,173,174], the reader is referred to the respective cited articles.…”