Structured light concepts for ultrafast production of micro-optical components

Flamm, Daniel; Zimmermann, Felix; Kaiser, Myriam; Großmann, Daniel; Chen, Keyou; Jenne, Michael; Kleiner, Jonas; Kumkar, Malte

doi:10.1117/12.2547351

Cited by 3 publications

(16 citation statements)

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“…The microscope images show the weld seams (above) and the etched contour (below). 69 feature for welding in industrial environment is the bridging of gaps. As mentioned above, stateof-the-art techniques are limited to about 3 μm.…”

Section: Laser Welding Of Transparent Materialsmentioning

confidence: 99%

“…Since femtosecond laser pulse welding around 1 μm wavelength of transparent materials requires moderate pulse energies <10 μJ 71 concepts for throughput scaling are becoming increasingly important. 6,67,69 This becomes even clearer if one considers the recent progress in pulse energy and average power of today's ultrafast laser platforms. 26 We use a structured light concept based on a diffractive 3D-beam splitter to discuss the potential of parallel processing for particularly efficient welding of transparent materials.…”

Section: Laser Welding Of Transparent Materialsmentioning

confidence: 99%

“…(b) Microscope images of the laser entrance glass side confirm high-quality edge contours. (c) Taper-free glass vias proven by SEM image 69.…”

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confidence: 99%

“…(b) From left channel to right: no etching, 5 min, 10 min, and 15 min etching in 30 wt. % KOH etch solution 69.…”

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confidence: 99%

“…Scanning electron microscope image of an array of nanochannels etched into ultrafast laser modified sapphire. For size comparison, on the upper left, a human hair is microscoped 69. …”

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confidence: 99%

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Structured light for ultrafast laser micro- and nanoprocessing

et al. 2021

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The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near-infrared down to the deep ultraviolet, e.g., based on nondiffracting beams and threedimensional-beam splitters, and demonstrate their impact for micro-and nanomachining of a wide range of materials. In the beam shaping concepts presented, special attention was paid to suitability for both high energies and high powers.

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Section: Laser Welding Of Transparent Materialsmentioning

confidence: 99%

Section: Laser Welding Of Transparent Materialsmentioning

confidence: 99%

“…(b) Microscope images of the laser entrance glass side confirm high-quality edge contours. (c) Taper-free glass vias proven by SEM image 69.…”

mentioning

confidence: 99%

“…(b) From left channel to right: no etching, 5 min, 10 min, and 15 min etching in 30 wt. % KOH etch solution 69.…”

mentioning

confidence: 99%

“…Scanning electron microscope image of an array of nanochannels etched into ultrafast laser modified sapphire. For size comparison, on the upper left, a human hair is microscoped 69. …”

mentioning

confidence: 99%

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Structured light for ultrafast laser micro- and nanoprocessing

et al. 2021

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Ultrafast laser cutting of transparent materials: the trend towards tailored edges and curved surfaces

Flamm

Kleiner

Kaiser

et al. 2021

Laser-Based Micro- And Nanoprocessing XV

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We report on ultrashort pulsed laser fabrication strategies for glass articles with customized edges and curved surfaces. To achieve single-pass, full-thickness modifications along the entire substrate, processing optics are presented that allow for beam shaping of non-diffracting beams and, additionally, for aberration compensation of phase distortions occurring at the tilted or curved interfaces. The efficacy of our concepts is presented by evaluating the surface and edge qualities of separated glass tubes with complex inner and outer contours as well as glass chamfer structures.

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Structured light for ultrafast laser micro- and nanoprocessing

Flamm,

Grossmann,

Sailer

et al. 2020

Preprint

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The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of novel laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near infrared down to the deep ultraviolet, e.g., based on non-diffracting beams and 3D-beam splitters, and demonstrate their impact for micro-and nanomachining of a wide range of materials. In the beam shaping concepts presented, special attention was paid to suitability for both high energies and high powers.

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Structured light concepts for ultrafast production of micro-optical components

Cited by 3 publications

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Structured light for ultrafast laser micro- and nanoprocessing

Structured light for ultrafast laser micro- and nanoprocessing

Ultrafast laser cutting of transparent materials: the trend towards tailored edges and curved surfaces

Structured light for ultrafast laser micro- and nanoprocessing

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