Studies of diamond-like carbon films coated on PMMA by ion beam assisted deposition

Effects of frequency of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition

“…The C-O bonding component is attributed to some residual contaminations formed on the surfaces due to air exposure [19]. It is known that the binding energy of C-H is 284.9-285.5 eV [14,20,21]. It is difficult to separate the sp 3 to occur by the decomposition of CH 4 molecules because CH 2 has a higher sticking coefficient than CH 3 [15].…”

The Properties and Application of Carbon Nanostructures

“…Raman peak for CVD spectrum at 1360 cm -1 is attributed to disordered mode of graphite and that at 1500-1550 cm -1 corresponds to an amorphous-like structure with sp 3 and sp 2 bonding [61]. CVD-carbon layer has a broad peak at 1530 cm -1 indicating that the deposited layers are composed mostly of amorphous carbon with sp 3 and sp 2 bonds [68]. Peak at 1360 cm -1 , which is also present in evaporated and sputtered C-layers, is due to the presence of disordered graphite [68].…”

“…CVD-carbon layer has a broad peak at 1530 cm -1 indicating that the deposited layers are composed mostly of amorphous carbon with sp 3 and sp 2 bonds [68]. Peak at 1360 cm -1 , which is also present in evaporated and sputtered C-layers, is due to the presence of disordered graphite [68]. Band position at 1617 cm -1 is typical for plane stretching C=C vibration (sp 2 ), called G ("graphite")-band in the case of carbon materials.…”

Tribological Performance of Alternating-Layered Si-DLC/DLC Films Under Humid Conditions

“…Diamond-like carbon (DLC) films have attracted considerable research interest on account of their widespread applications, such as protective coatings for optical windows, magnetic storage disks, car parts, biomedical coatings, micro-electromechanical devices, and micro-actuators [1][2][3][4][5].…”