2014
DOI: 10.1088/0963-0252/23/6/065007
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Studies of xenon ECR plasma: search for a better understanding of the gas-mixing and anomalous effects

Abstract: Pure and oxygen-mixed xenon plasmas were produced using 10 GHz all-permanent-magnet electron cyclotron resonance (ECR) ion source. The charge state distributions (CSDs) of highly abundant isotopes ( 129 Xe, 131 Xe and 132 Xe) were studied by extracting the ions from the plasma and analyzed them in mass and energy using a large acceptance analyzer-switching dipole magnet. In earlier studies (Drentje 1992 Rev. Sci. Instrum. 63 2875, Kawai et al 2001 Plasma Sources Sci. Technol. 10 451), the CSD of oxygen and nit… Show more

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Cited by 6 publications
(7 citation statements)
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“…The observed trends in the intensities of Kr isotopes may be due to the nonlinear effects (induced ion sound wave scattering on ions), which take the smallness of the relative mass difference (ΔA/A) into account to model the heating mechanism of the ions having different charge to mass ratios [23,24] in two-component plasmas. The comparison of the present results with previously studied Xe plasma [21] , which showed complete absence of the isotope anomaly, further indicates that the relative mass difference plays some role to yield final ion intensities in the plasma. However, validating the nonlinear Landau damping model would require more experiments by varying the mixing ratios and simplifying the experimental procedure to two-component plasma without oxygen mixing.…”
Section: Resultssupporting
confidence: 83%
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“…The observed trends in the intensities of Kr isotopes may be due to the nonlinear effects (induced ion sound wave scattering on ions), which take the smallness of the relative mass difference (ΔA/A) into account to model the heating mechanism of the ions having different charge to mass ratios [23,24] in two-component plasmas. The comparison of the present results with previously studied Xe plasma [21] , which showed complete absence of the isotope anomaly, further indicates that the relative mass difference plays some role to yield final ion intensities in the plasma. However, validating the nonlinear Landau damping model would require more experiments by varying the mixing ratios and simplifying the experimental procedure to two-component plasma without oxygen mixing.…”
Section: Resultssupporting
confidence: 83%
“…The observed trends in the isotope anomaly do not follow the prediction of linear Landau damping. In comparison with the previous study of the xenon plasma , the influence of the relative mass difference on the isotopic anomaly is also seen in the present experiment. The present experiment performed with powerful ECR ion sources, which produce high intensities of highly charged ions, will certainly be very useful to shed more light on the isotope anomaly in ECR plasmas.…”
Section: Resultsmentioning
confidence: 99%
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“…A set of pristine indium oxide films was implanted with 25‐keV N + ions at three different fluences (viz. 1.0 × 10 15 , 5.0 × 10 15 and 1.0 × 10 16 ions/cm 2 ) using electron cyclotron resonance (ECR) ion sourced‐based low energy ion beam facility (LEIBF) . Another set of the pristine films was implanted with 25‐keV Co − ions also at the same fluences using the source of negative ions by Cs sputtering (SNICS).…”
Section: Methodsmentioning
confidence: 95%