Studies on optical constants of metal films evaporated at low temperatures

Okuno, Y.; Shinya, Akihiko; Kuwahara, Minoru; Fukui, Masuo; Shintani, Yoshihiro

doi:10.1016/0039-6028(94)00669-5

Cited by 6 publications

(3 citation statements)

References 20 publications

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“…Thin metal film has been widely used in opto-electronics, bio-chemistry and physics because of its peculiar plasmonic properties which not only relate to material properties, but also depend on thickness and characteristic structure [1][2][3] . But due to different processes and environments in the production of thin film, optical properties have diverse results 4 . Therefore, the determination of the thickness and optical constants of thin metal films have been an important subject for many years.…”

Section: Introductionmentioning

confidence: 99%

Determination of bimetallic film’s thickness and optical constants based on SPR phase detection

Yue

Ding

Tao

et al. 2023

AOPC 2022: Optoelectronics and Nanophotonics

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A method for solving bimetallic film coefficients using surface plasmon resonance (SPR) phase difference experimental data with fixed wavelength and multiple incident angles is presented to simplify and quickly solve the thickness and optical constants of metal films in this paper. The purpose is to extract unknown parameters from the phase difference between P-and S-polarizations of the reflected light occurred at the metal/dielectric interface. The results of bimetallic layer film's thickness and optical constants obtained by our method are in better agreement with that of spectroscopic ellipsometer (SE) measurement method. Therefore, the approach reveals the possibility of retrieving the thickness and optical constants from the measurement results of the phase difference for multilayers, and makes it be a much better option to be employed for further film's parameter analysis applications.

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Section: Introductionmentioning

confidence: 99%

Determination of bimetallic film’s thickness and optical constants based on SPR phase detection

Yue

Ding

Tao

et al. 2023

AOPC 2022: Optoelectronics and Nanophotonics

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“…Normally, a thin Ag film is used in transparent heat mirrors to enhance the high reflection in the infrared spectral range. Ag film can be prepared by many different techniques such as cathodic vacuum arc [1], thermal evaporation [2] and DC sputtering [4]. However, DC sputtering is the simplest method for Ag coating.…”

Section: Introductionmentioning

confidence: 99%

“…Oates and co-workers [1] investigated the optical properties of ultra-thin silver films from silver island growth through percolation and continuous film growth by in situ spectroscopic ellipsometry for biosensor applications. Okuno et.,al [2] studied on optical constants of metal films evaporated at low temperatures. Some investigations show that the optical properties can be affected by film thickness for the Ag film [3].…”

Section: Introductionmentioning

confidence: 99%

Temperature Dependence of Optical Constants of Silver Film Studied by <i>In Situ</i> Spectroscopic Ellipsometry

Rojebuathong

Chindaudom

Luangtip

et al. 2008

AMR

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A silver film was deposited on silicon wafer by DC unbalance magnetron sputtering system. The temperature dependence of the silver film was investigated. The spectroscopic ellipsometry (SE) with the heating of sample stage (HTC100) was employed for the in situ SE measurement under annealing cycles of the sample from room temperature to 300°C in dry nitrogen gas. The results show that the pseudo dielectric constants (<ε1>, < ε2>) of the sample varied with an annealing temperature. The real part of pseudo dielectric constant (<ε1>) of annealed Ag film was slightly changed and the imaginary part (< ε2>) was strongly increased at a photon energy below the optical band gap (3.5-4.5 eV). Furthermore, the pseudo dielectric constant of imaginary part at low energy region was changed due to the enhancement of crystallinity of Ag film at 300°C. All measured SE spectra were fitted by Drude-Lorentz optical model, the scattering time and resistivity were obtained.

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Determination of thin metal film’s thickness and optical constants based on SPR phase detection by simulated annealing particle swarm optimization

Yue

Qin

Lang

et al. 2019

Optics Communications

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Studies on optical constants of metal films evaporated at low temperatures

Cited by 6 publications

References 20 publications

Determination of bimetallic film’s thickness and optical constants based on SPR phase detection

Determination of bimetallic film’s thickness and optical constants based on SPR phase detection

Temperature Dependence of Optical Constants of Silver Film Studied by <i>In Situ</i> Spectroscopic Ellipsometry

Determination of thin metal film’s thickness and optical constants based on SPR phase detection by simulated annealing particle swarm optimization

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