Study of anodic oxide films formed on solid-state sintered SiC-ceramic at high anodic potentials

Schneider, Michael; Šimůnková, L.; Michaelis, Alexander; Noeske, Michael; Anioł, Jacek; Thiel, Karsten

doi:10.1016/j.ceramint.2021.02.056

Cited by 8 publications

(1 citation statement)

References 32 publications

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“…On the other hand, peaks of both the oxides SiO 2 and SiO x C y appear in all three regions. The nonstoichiometric silicon oxy-carbide (SiO x C y ), with a binding energy peak located at 102.8 eV in the Si 2p spectrum and 284.4 eV in the C 1 s spectrum, indicates an intermediate oxide before forming SiO 2 [32,33]. Combined with the EDS spectra, we conclude that the unmachined surface remains in a complete oxidation state, which is hardly affected by the plasma.…”

Section: Characteristics Of Materials Removal and Surface Chemistrymentioning

confidence: 80%

Plasma-enabled electrochemical jet micromachining of chemically inert and passivating material

Zhan

Liu

et al. 2022

Int. J. Extrem. Manuf.

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Electrochemical jet machining (EJM) encounters significant challenges in the microstructuring of chemically inert and passivating materials because an oxide layer is easily formed on the material surface, preventing the progress of electrochemical dissolution. This research demonstrates for the first time a jet-electrolytic plasma micromachining (Jet-EPM) method to overcome this problem. Specifically, an electrolytic plasma is intentionally induced at the jet-material contact area by applying a potential high enough to surmount the surface boundary layer (such as a passive film or gas bubble) and enable material removal. Compared to traditional EJM, introducing plasma in the electrochemical jet system leads to considerable differences in machining performance due to the inclusion of plasma reactions. In this work, the implementation of Jet-EPM for fabricating microstructures in the semiconductor material 4H-SiC is demonstrated, and the machining principle and characteristics of Jet-EPM, including critical parameters and process windows, are comprehensively investigated. Theoretical modeling and experiments have elucidated the mechanisms of plasma ignition/evolution and the corresponding material removal, showing the strong potential of Jet-EPM for micromachining chemically resistant materials. The present study considerably augments the range of materials available for processing by the electrochemical jet technique.

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Section: Characteristics Of Materials Removal and Surface Chemistrymentioning

confidence: 80%

Plasma-enabled electrochemical jet micromachining of chemically inert and passivating material

Zhan

Liu

et al. 2022

Int. J. Extrem. Manuf.

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show abstract

Low-Temperature Synthesis of the β-SiC Particle by Microwave Heating of Solar Waste Silicon Powder

Zhao¹,

Xie²,

Shao

et al. 2023

Environmental Science and Engineering

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Electrochemical oxidation and corrosion behavior of 3D printed reaction-bonded silicon carbide ceramics in eco-friendly electrolyte

Li,

Liu,

Wang

et al. 2024

Ceramics International

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Study of anodic oxide films formed on solid-state sintered SiC-ceramic at high anodic potentials

Cited by 8 publications

References 32 publications

Plasma-enabled electrochemical jet micromachining of chemically inert and passivating material

Plasma-enabled electrochemical jet micromachining of chemically inert and passivating material

Low-Temperature Synthesis of the β-SiC Particle by Microwave Heating of Solar Waste Silicon Powder

Electrochemical oxidation and corrosion behavior of 3D printed reaction-bonded silicon carbide ceramics in eco-friendly electrolyte

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