Study of electrical characteristics of polyoxides grown by rapid thermal oxdidation

Lo, G. Q.; Cheung, A. W.; Kwong, D. L.; Alvi, N. S.

doi:10.1063/1.104135

Cited by 2 publications

(1 citation statement)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In general, the rapid thermal oxidation ͑RTO͒-grown polyoxide has a higher breakdown field ͑8-9 MV/cm͒ and reduced leakage current than that grown in the conventional furnace ͑5-6 MV/cm͒ due to smoother interface by the rapid thermal process. 32 Furthermore, the RTN 2 O-grown polyoxide at moderate growth temperature can reach a high breakdown field ͑13-14 MV/cm͒ and low leakage current due to nitrogen incorporated and existing in the interfaces. But when RTN 2 O oxidation occurs at higher temperatures, excessive nitrogen incorporated at the Si/SiO 2 interface leads to an inhomogeneous oxide growth and thickness nonuniformity.…”

Section: Resultsmentioning

confidence: 99%

Oxide Grown on Polycrystal Silicon by Rapid Thermal Oxidation in N[sub 2]O

Kao

Lai

Lee

2006

J. Electrochem. Soc.

View full text Add to dashboard Cite

In this paper, rapid thermal processing ͑RTP͒ N 2 O polyoxides were studied in terms of oxidation temperature and thickness with O 2 oxidation polyoxides as comparison. Atomic force microscopy, transmission electron microscopy, and secondary ion mass spectroscopy measurements were employed to correlate the electrical characteristics with the physical structures. Results showed that RTP N 2 O-grown polyoxides exhibited better characteristics on the leakage current, E bd , trappings and Q bd. It was found that it was the proper amount of nitrogen incorporated in the polyoxide improving the interface of the polyoxide/polysilicon, consequently improving the electrical quality. The initial hole-trapping phenomenon during the constant current stress, which was due to the incorporated nitrogen, was also observed in the N 2 O-grown polyoxides. The two-step RTP process, i.e., first RTP oxidizing the polysilicon in O 2 and then RTP oxidizing in N 2 O, could achieve polyoxide of good characteristics by incorporating the proper amount of nitrogen into the polyoxide.

show abstract

Section: Resultsmentioning

confidence: 99%