Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams

Abstract

A downsized wavelength dispersive X-ray spectrometer, employing a flat crystal and a CCD detector for use with focused ion beams has been constructed and employed to study ion beam induced chemical effects in Si K X-ray spectra from silicon and its selected compounds.

Influence of chemical effects on Al high-resolution Kα X-ray spectra in proton and alpha particle induced X-ray spectra

“…The high-resolution PIXE measurements were performed using our high-resolution at crystal spectrometer installed at the ion microprobe end-station of the RuCer Bošković Institute Tandem Accelerator Facility in Zagreb. A detailed description of the spectrometer and an explanation of the X-ray spectra extraction algorithm can be found elsewhere, 40,41 and therefore only basic data are given here. The spectrometer consists of a sample holder, at diffraction crystal and CCD X-ray detector enclosed in a vacuum chamber and mounted behind the main ion microbeam chamber.…”

“…Having this in mind we recently developed a simple at-crystal WDX spectrometer for use with focused ion beams in the MeV range capable of analysing microscopic samples. 40,41 The spectrometer has been specically designed to obtain favourable X-ray energy resolution in the X-ray energy range between 1 and 5 keV. It has been installed at the ion microprobe beam line for use with few MeV proton beams or heavier ions, exploiting the fact that for 2-3 MeV protons X-ray production cross sections are much larger for low Z elements than for heavier elements.…”

Highly Sensitive Nondestructive Rare Earth Element Detection by Means of Wavelength-Dispersive X-ray Fluorescence Spectroscopy Enabled by an Energy Dispersive pn-Charge-Coupled-Device Detector

“…The results obtained in this paper represent a significant improvement compared to similar WD-XRF approaches, combining a flat analyzer crystal with a CCD detector. [22][23][24]33 The mentioned setups mostly focus on the detection of K-lines, which have a higher elemental yield using an excitation energy of 10.8 keV and consequently also a lower LOD compared to L-lines. The energy resolution was calculated as the full width at half-maximum (fwhm) for different XRF-lines for the NIST SRM 611 and for an inclusion spectrum (Ti hotspot 4).…”

“…With the presented wavelength dispersive (WD) X-ray fluorescence detection method, it is possible to detect the fluorescence L-lines between 4.5 and 7 keV, originating from REE elements with an energy resolution of 18 eV and a sensitivity level of 0.50 ppm. This sensitivity for fluorescent L-lines is a significant improvement compared to similar WD-XRF approaches, combining a flat analyzer crystal with a CCD detector. − The characteristic fluorescence X-rays, originating from the sample, are collected under Bragg condition by a Ge(111) analyzer crystal, dispersing the XRF radiation onto the detector chip of a full-field energy dispersive pn-charge-coupled-device (pnCCD) detector, the SLcam, rendering a spectrum with an energy resolution of 12 eV for the Ti–Kα fluorescence line. The strength of this wavelength dispersive detection setup, when compared to existing wavelength dispersive setups, − is a consequence of the use of an energy dispersive 2D full-field detector; by using the energy dispersive character of the SLcam, higher order diffractions or diffractions from other crystal planes of the analyzer crystal are separated in the energy domain from the first order diffractions resulting in an interference free, low-background detection yielding considerably higher sensitivity than that reported earlier.…”

A parallel-beam wavelength-dispersive X-ray emission spectrometer for high energy resolution in-air micro-PIXE analysis

“…[13][14][15][16][17][18] Apart from their moderate efficiency, such spectrometers are also quite large, and require a complex alignment procedure and a xed beam spot, which is usually not compatible with ion microprobes. A compact at crystal WDS spectrometer coupled to an ion microprobe has been introduced recently, 19,20 mainly to perform chemical state analysis with focused ion beams and has not been used for PIXE mapping.…”