Study of optical properties of MoxC1−x films

Temmerman, G. De; Ley, M.; Boudaden, Jamila; Oelhafen, P.

doi:10.1016/j.jnucmat.2004.10.037

Cited by 21 publications

(22 citation statements)

References 16 publications

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“…This line is associated with a pure amorphous carbon phase coming from the coating of the hollow cathode, this position is consistent with the one reported by other authors. 26 The presence of an amorphous carbon film explains the observed reflectivity decrease. A cleaning of this sample was carried out with hydrogen plasma for 30 min.…”

Section: A Evolution Of the Reflectivity After Laboratory Deuterium mentioning

confidence: 88%

Rhodium coated mirrors deposited by magnetron sputtering for fusion applications

Marot

Temmerman

Oelhafen

et al. 2007

Review of Scientific Instruments

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Metallic mirrors will be essential components of all optical spectroscopy and imaging systems for ITER plasma diagnostics. Any change in the mirror performance, in particular, its reflectivity, due to erosion of the surface by charge exchange neutrals or deposition of impurities will influence the quality and reliability of the detected signals. Due to its high reflectivity in the visible wavelength range and its low sputtering yield, rhodium appears as an attractive material for first mirrors in ITER. However, the very high price of the raw material calls for using it in the form of a film deposited onto metallic substrates. The development of a reliable technique for the preparation of high reflectivity rhodium films is therefore of the highest importance. Rhodium layers with thicknesses of up to 2 microm were produced on different substrates of interest (Mo, stainless steel, Cu) by magnetron sputtering. Produced films exhibit a low roughness and crystallite size of about 10 nm with a dense columnar structure. No impurities were detected on the surface after deposition. Scratch tests demonstrate that adhesion properties increase with substrate hardness. Detailed optical characterizations of Rh-coated mirrors as well as results of erosion tests performed both under laboratory conditions and in the TEXTOR tokamak are presented in this paper.

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Section: A Evolution Of the Reflectivity After Laboratory Deuterium mentioning

confidence: 88%

Rhodium coated mirrors deposited by magnetron sputtering for fusion applications

Marot

Temmerman

Oelhafen

et al. 2007

Review of Scientific Instruments

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“…Deposition of both rhodium and molybdenum films was performed in high vacuum chambers, pumped down to a pressure about 2 × 10 −4 Pa for magnetron sputtering [9] and 1 × 10 −5 Pa for electron beam evaporation [10]. Silicon wafer pieces, polished stainless steel and polished molybdenum were used as substrates for molybdenum films, whereas polished tungsten was used for rhodium films.…”

Section: Methodsmentioning

confidence: 99%

Reflective metallic coatings for first mirrors on ITER

Eren

Marot

Litnovsky

et al. 2011

Fusion Engineering and Design

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“…In this sense, the measurement of optical or electrical properties can shed light on the relationship between the crystalline phases, microstructure, and the fundamental properties of these films. Park et al 21 studied the electrical resistivity of WC-C nanocomposites, and De Temmerman et al 22 studied the influence of the optical properties for Mo x C 1−x . 11,12 Less information is found for the transition metal carbide series: WC, [13][14][15][16] ZrC, 17 TiC, 17,18 TiSiC, 19 and TiBC.…”

Section: Introductionmentioning

confidence: 99%

WC/a-C nanocomposite thin films: Optical and electrical properties

Abad

Sánchez-López

Cusnir

et al. 2009

Journal of Applied Physics

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Optical properties of tantalum nitride films fabricated using reactive unbalanced magnetron sputtering WC/amorphous carbon ͑a-C͒ thin films were deposited by dual magnetron sputtering from individual WC and graphite targets. The influence of film composition and microstructure on the optical and electrical properties was investigated. As evidenced by x-ray photoelectron spectroscopy and grazing angle x-ray diffraction measurements, the WC/a-C films are composite materials made of hexagonal W 2 C and/or cubic ␤-WC 1−X nanocrystallites embedded in ͑a-C͒ matrix. The optical properties were studied by spectroscopic ellipsometry and the electrical resistivity was measured by the van der Pauw method between 20 and 300 K. Both the optical and the electrical properties of the WC/a-C films are correlated with the chemical composition and microstructure evolution caused by a-C addition. The optical properties of W 2 C / a-C and ␤-WC 1−x / a-C films with a-C content Յ10 at. % are explained by modeling their dielectric functions by a set of Drude-Lorentz oscillators. Further increase in a-C content leads only to the formation of ␤-WC 1−x / a-C nanocomposite structures and their optical properties progressively evolve to those of a-C single phase. The electrical resistivity as a function of the temperature of all the films exhibits a negative temperature coefficient of resistivity. Theoretical fitting using the grain-boundary scattering model shows that the transport properties are mainly limited by the grain size and electron mean free path parameters.

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Study of optical properties of MoxC1−x films

Cited by 21 publications

References 16 publications

Rhodium coated mirrors deposited by magnetron sputtering for fusion applications

Rhodium coated mirrors deposited by magnetron sputtering for fusion applications

Reflective metallic coatings for first mirrors on ITER

WC/a-C nanocomposite thin films: Optical and electrical properties

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