2010
DOI: 10.1109/tdmr.2010.2044180
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Study of Random Dopant Fluctuation Effects in FD-SOI MOSFET Using Analytical Threshold Voltage Model

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Cited by 34 publications
(8 citation statements)
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“…The junctionless (JL) device concept with highchannel doping concentration is very encouraging and futuristic; however, it poses severe challenges: 1) threshold voltage (V th ) variability due to random dopant fluctuations (RDFs) [5], [6]; 2) low ON-state current due to high source/drain (S/D) series resistance and poor mobility [4], [7]; 3) increased parasitic capacitances [8]; 4) higher gate workfunction (>5.5 eV) requirement to turn-OFF the device [1]; 5) poor switch-OFF capability that is undesired latch up problem due to impact ionization at high drain bias [9]. Rao et al [10] demonstrated that even in inversion mode (IM) devices the V th fluctuations were mainly caused by RDFs, that is expected to further degrade with variation in channel doping and gate length. Aldegunde et al [6] showed that the JL nanowire transistors have much higher subthreshold variability than their counterpart IM devices of equivalent geometry.…”
Section: Introductionmentioning
confidence: 99%
“…The junctionless (JL) device concept with highchannel doping concentration is very encouraging and futuristic; however, it poses severe challenges: 1) threshold voltage (V th ) variability due to random dopant fluctuations (RDFs) [5], [6]; 2) low ON-state current due to high source/drain (S/D) series resistance and poor mobility [4], [7]; 3) increased parasitic capacitances [8]; 4) higher gate workfunction (>5.5 eV) requirement to turn-OFF the device [1]; 5) poor switch-OFF capability that is undesired latch up problem due to impact ionization at high drain bias [9]. Rao et al [10] demonstrated that even in inversion mode (IM) devices the V th fluctuations were mainly caused by RDFs, that is expected to further degrade with variation in channel doping and gate length. Aldegunde et al [6] showed that the JL nanowire transistors have much higher subthreshold variability than their counterpart IM devices of equivalent geometry.…”
Section: Introductionmentioning
confidence: 99%
“…19) An approximately analytical model of σV th in FD-SOI MOSFETs has already been proposed. 20) As is presented, the fluctuations of V th increase with the scaling down of devices, which is mainly caused by RDF in the channel. It was found that V th fluctuation depends on oxide thickness, silicon film thickness, and channel dopant number and position.…”
Section: Introductionmentioning
confidence: 89%
“…The analytical threshold voltage model of FD-SOI MOSFET with random dopant fluctuations was demonstrated in [17]. Moreover, The dependence of different device parameters, such as channel length, thicknesses of gate oxide and silicon film on deviation of threshold voltage is studied.…”
Section: Introductionmentioning
confidence: 99%