Study of the spin on dopant technique as alternative for the fabrication of c-Si solar cells

Martínez, J.; Moreno, Mario; Rosales, Pedro; Torres, Alfonso; Ambrosio, Roberto; Murias, D.

doi:10.1109/pvsc.2016.7750090

Cited by 3 publications

(3 citation statements)

References 4 publications

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“…Silicon nanograss was grown only in front surface by coating the polymer on rear side.SOD (spin on doping) and RTA (rapid thermal annealing) wereparticularly necessary for swallow junction diffusion. High temperature annealing with rapid temperature rise and drop reduced thermal budget [9]. In this paper we have used SOD and RTA for diffusion over silicon nanograss structure.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of low cost nano-grass n-type C-Si solar cell with sol–gel Al2O3 passivation

2020

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Silicon nano-grass Solar cell has the advantage of enhancing efficiency with cost effective method. Highly ordered silicon nano-grass is formed by chemical etching process. During this chemical etching unwanted nanograss is formed on both side of the wafer, resulting considerable transmission loss from rear side. This results in ultimate reduction of efficiency. The detrimental effect of nano-grass formation on both side of the wafer is briefly demonstrated here by simulation methods. Adopting the idea by simulation method this paper has reported silicon front sided nano-grass n-type c-Si solar cell by spin on diffusion source and rapid thermal annealing. The sheet resistance of the nano-grass silicon wafer is varied with respect to different spin-on diffusion profile. Later front surface has been passivated by sol-gel Al 2 O 3 passivation. Eventually all the spin doped silicon nano-grass solar cell with sol-gel Al 2 O 3 passivation provides a very promising route of cost effective high efficiency silicon solar cell technology. Broadband reflection between 300 and 1100 nm wavelengths has been suppressed to 2% for nano-grass Solar cell and maximum efficiency of 16.57% is achieved.

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Section: Introductionmentioning

confidence: 99%

Fabrication of low cost nano-grass n-type C-Si solar cell with sol–gel Al2O3 passivation

2020

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“…An alternative method is to use spin-on dopant (SOD), which spins a dopant-containing solution onto Si substrates, followed by the thermal curing and then the thermal diffusion steps (Teh et al, 1989;Martínez et al, 2016;Hoarfrost et al, 2013). This method offers a number of advantages over conventional methods that were abovementioned: i) Room temperature spinning process and only one time furnace used for drive-in enable the SOD technique simple and rapid; ii) The SOD sources feature relative low-cost and safe, and therefore the monitor toxic gas can be eliminated; and iii) abandon of high energy dopant ions allow for SOD technique being nondestructive.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Spin-on Dopants and Curing Temperature Effect on Dopant Activation

Patel¹,

Saporito²,

Cui³

et al. 2019

APR

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Spin-on dopant technique has been investigated in the paper. The boron and phosphorus were used as p-and n-type dopant sources and were deposited on silicon substrates, followed by the baking process to evaporate the solvents from spin-on dopant layers. The standard drive-in process was applied to diffuse and activate the dopants. The curing temperature varied from 150 to 200 o C to investigate the temperature effect on dopant activation. It is suggested that for our selected spin-on dopant sources, the curing temperature and time of 175 o C and 60 minutes would lead to the best result of dopant activation during drive-in process, evidenced by the lowest sheet resistance, which was measured using four-point probe measurement method.

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“…We proposed using spin-on dopant [2] and electron beam lithography as a low-cost alternative. Spin-on dopant is commonly used to make electronic devices [3,4] and solar cells [5,6] but, to the best of our knowledge, has not been used to fabricate active silicon photonic devices. Students were given the objective to perform a design-fabricate-test cycle of a thermo-optic 2x2 switch based on a Mach-Zehnder Interferometer.…”

Section: Introductionmentioning

confidence: 99%

Teaching undergraduate students integrated photonics and fabrication through research

Witt

Luan

Awan

et al. 2019

Fifteenth Conference on Education and Training in Optics and Photonics: ETOP 2019

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An innovative undergraduate level Nanofabrication course with a focus on photonics is proposed. This course challenges the definition of what constitutes an undergraduate class in a research-intensive university. Namely, instructor and teaching assistants (TAs) propose a moderately challenging graduate-level research project that has not been previously published; challenge the Team, consisting of the students, with the TAs and instructor, to research during the class, as a Team; have the Team collaborate on writing a research paper with the goal of submitting it to an archival journal. Through this process, students learn the course content and experience how research is conducted.

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Study of the spin on dopant technique as alternative for the fabrication of c-Si solar cells

Cited by 3 publications

References 4 publications

Fabrication of low cost nano-grass n-type C-Si solar cell with sol–gel Al2O3 passivation

Fabrication of low cost nano-grass n-type C-Si solar cell with sol–gel Al2O3 passivation

Investigation of Spin-on Dopants and Curing Temperature Effect on Dopant Activation

Teaching undergraduate students integrated photonics and fabrication through research

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