2014
DOI: 10.1016/j.vacuum.2014.06.015
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Study of the ultra-high-vacuum system of the 14-m-long vacuum chamber of the Taiwan Photon Source using the pressure build-up method

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Cited by 7 publications
(3 citation statements)
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“…3 illustrates the history of the baking cycles for the 24 arc-cells and the statistics of the leakage troubles encountered through the baking. Each cell, with the combination of the pumping with the triode sputtering ion pumps (SIP) and the non-evaporable getter (NEG) pumps, has reached to a typical ultimate pressure < 5 Â 10 À9 Pa of UHV after baking [13]. The pressure build-up test, by switching the SIP off over 60 h, for the entire 14 m vacuum system kept the pressure under 4 Â 10 À7 Pa for most of the cells which were only pumped with the NEGs.…”
Section: Vacuum Baking For the 14 M Vacuum Systemsmentioning
confidence: 99%
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“…3 illustrates the history of the baking cycles for the 24 arc-cells and the statistics of the leakage troubles encountered through the baking. Each cell, with the combination of the pumping with the triode sputtering ion pumps (SIP) and the non-evaporable getter (NEG) pumps, has reached to a typical ultimate pressure < 5 Â 10 À9 Pa of UHV after baking [13]. The pressure build-up test, by switching the SIP off over 60 h, for the entire 14 m vacuum system kept the pressure under 4 Â 10 À7 Pa for most of the cells which were only pumped with the NEGs.…”
Section: Vacuum Baking For the 14 M Vacuum Systemsmentioning
confidence: 99%
“…The pressure build-up test, by switching the SIP off over 60 h, for the entire 14 m vacuum system kept the pressure under 4 Â 10 À7 Pa for most of the cells which were only pumped with the NEGs. The typical residual gases measured in the 14 m vacuum system with a residual gas analyzer (RGA) contained the major outgas of H 2 , CH 4 , Ar, and He, for most of the cells [12,13].…”
Section: Vacuum Baking For the 14 M Vacuum Systemsmentioning
confidence: 99%
“…Large scientific facilities such as accelerator [1] and tokamak [2,3] have big vacuum chambers in which various vacuum components are installed. The vacuum components always have pipes/ channels for the purpose of cooling or baking, such as the thermal shield (TS) [4] and the plasma facing components (PFCs) [5] in a tokamak.…”
mentioning
confidence: 99%