Study of Thin Film LiNbO<sub>3</sub> Laterally Excited Bulk Acoustic Resonators

This paper reviews the latest developments in microwave acoustic wave devices. After an introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given for guided SAWs and XBARs -two new technologies, which are promising for future 5G applications. Following this, we discuss recent simulation techniques, such as 3D finite element method (3D FEM) and simulation of nonlinearities, as well as filter synthesis. Next, a review on tunable and reconfigurable acoustics is given. Finally, we present the latest developments in microwave acoustics for millimeter-wave (mm-wave) operation as well as BAW oscillators.INDEX TERMS Bulk acoustic wave (BAW) devices, filter, filter-synthesis, front-end, high power, MTT 70th Anniversary Special Issue, multiplexer, nonlinearity, resonator, surface acoustic wave (SAW) devices.

show abstract

“…Dependencies of the resonator admittance on the device geometry, parasitic responses, Q, etc. were studied experimentally [29], [30]. Fig.…”

Section: A Xbar: Idea and Propertiesmentioning

confidence: 99%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

View full text Add to dashboard Cite

show abstract

“…First, we investigate the effect of electrode rotation angle in respect to x -direction with Z-cut LiNbO 3 plate on

. The

of XBAR can be obtained by the approximated Formulas (2) and (3) [ 22 , 23 , 24 ]. It can be concluded that the

is positive to piezoelectric coefficient e 15 of Z-cut LiNbO 3 thin film.…”

Section: Design and Simulationmentioning

confidence: 99%

Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes

et al. 2023

View full text Add to dashboard Cite

In this paper, we present a comprehensive study on the propagation and dispersion characteristics of A1 mode propagating in Z-cut LiNbO3 membrane. The A1 mode resonators with pentagon spiral electrodes utilizing Z-cut lithium niobate (LiNbO3) thin film are designed and fabricated. The proposed structure excites the A1 mode waves in both x- and y-direction by utilizing both the piezoelectric constants e24 and e15 due to applying voltage along both the x- and y-direction by arranging pentagon spiral electrode. The fabricated resonator operates at 5.43 GHz with no spurious mode and effective electromechanical coupling coefficient (Keff2) of 21.3%, when the width of electrode is 1 µm and the pitch is 5 µm. Moreover, we present a comprehensive study of the effect of different structure parameters on resonance frequency and Keff2 of XBAR. The Keff2 keeps a constant with varied thickness of LiNbO3 thin film and different electrode rotation angles, while it declines with the increase of p from 5 to 20 µm. The proposed XBAR with pentagon spiral electrodes realize high frequency response with no spurious mode and tunable Keff2, which shows promising prospects to satisfy the needs of various 5 G high-band application.

show abstract

“…[1][2][3] For such applications, HF devices fabricated using acoustic devices such as plate acoustic wave (PAW), surface acoustic wave, and bulk acoustic wave (BAW) are being researched. [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] PAW and BAW devices are suitable for HF applications (>5 GHz), but self-supported piezoelectric plates thinner than 500 nm are fragile and difficult to withstand high-power signals. [4][5][6][7][8]18,20) In comparison to the self-supported devices, a solidlymounted BAW (SM-BAW) device is more robust.…”

Section: Introductionmentioning

confidence: 99%

9.5–12 GHz solidly mounted bulk acoustic wave resonators utilizing overtone of thickness extension mode

Kadota,

Yamashita,

Tanaka

2024

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

To realize high-frequency bulk acoustic wave (BAW) devices, we have explored the application of integer multiples of overtones (3rd and 6th) of the thickness extension mode in solidly-mounted resonators (SM-BAWRs). When the average thickness of the acoustic films in the Bragg reflector of the SM-BAW device is wavelength (λ)/4, the fundamental mode is strongly excited, but overtone excitation is weak. However, it was found that 0.035λ-0.075λ acoustic layer thickness of a Bragg reflector was suitable for 3rd overtone excitation using a single LiNbO3 (LN) layer and 0.01λ-0.045λ for 6th overtone excitation using a polarization-flipped double LN layer. By using a 1 μm thick LN single thin layer, we successfully excited 3rd overtone at 9.5 GHz. Furthermore, overtones at 9.5 and 12 GHz were excited by bonding 1 μm and 0.9 μm thick LN plates with different polarities.

show abstract

Study of Thin Film LiNbO₃ Laterally Excited Bulk Acoustic Resonators

Cited by 48 publications

References 41 publications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes

9.5–12 GHz solidly mounted bulk acoustic wave resonators utilizing overtone of thickness extension mode

Contact Info

Product

Resources

About

Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators

Cited by 48 publications

References 41 publications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes

9.5–12 GHz solidly mounted bulk acoustic wave resonators utilizing overtone of thickness extension mode

Contact Info

Product

Resources

About

Study of Thin Film LiNbO₃ Laterally Excited Bulk Acoustic Resonators