Study on a High Performance MEMS Infrared Thermopile Detector

Bao, Aida; Cheng, Liang; Mao, Haiyang; Li, Ruirui; Guan, Yihao

doi:10.3390/mi10120877

Cited by 21 publications

(13 citation statements)

References 12 publications

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“…Furthermore, responsivity can be increased by employing double layer structures [ 53 , 54 ]: in this way, the limit imposed by the maximum number of thermocouples that can be fabricated per unit area can be overcome. In a double layer structure the N-type and the P-type thermocouple legs are located in different planes, thus allowing reducing the detector size, while maintaining high performance.…”

Section: State-of-the-art Reviewmentioning

confidence: 99%

“…In a double layer structure the N-type and the P-type thermocouple legs are located in different planes, thus allowing reducing the detector size, while maintaining high performance. The thermopile sensor proposed in [ 54 ] is illustrated in Figure 10 .…”

Section: State-of-the-art Reviewmentioning

confidence: 99%

“…Table 2 reports the main characteristics of different thermopile-based thermal detectors. The considered thermopile sensors have been proposed in the referenced papers for various applications: contactless human body temperature measurements [ 15 , 60 ], motion and presence detection [ 63 ], high resolution imaging applications [ 56 ], high-precision IR detection applications [ 54 ], long-distance measuring thanks an intrinsically reduced FOV angle [ 62 ]. Thermopile sensors, therefore, appear particularly well suited for COVID-19 related applications as they are very versatile and can be employed both for contactless fever measurements and for presence and motion detection applications enabling people counting or appliances automation.…”

Section: State-of-the-art Reviewmentioning

confidence: 99%

“… ( a ) Microphotograph of the thermopile sensor and ( b ) photograph of the packaged device presented in [ 54 ]. …”

Section: Figurementioning

confidence: 99%

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Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

2021

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The worldwide spread of COVID-19 has forced us to adapt to a new way of life made of social distancing, avoidance of physical contact and temperature checks before entering public places, in order to successfully limit the virus circulation. The role of technology has been fundamental in order to support the required changes to our lives: thermal sensors, in particular, are especially suited to address the needs arisen during the pandemic. They are, in fact, very versatile devices which allow performing contactless human body temperature measurements, presence detection and people counting, and automation of appliances and systems, thus avoiding the need to touch them. This paper reviews the theory behind thermal detectors, considering the different types of sensors proposed during the last ten years, while focusing on their possible employment for COVID-19 related applications.

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Section: State-of-the-art Reviewmentioning

confidence: 99%

Section: State-of-the-art Reviewmentioning

confidence: 99%

Section: State-of-the-art Reviewmentioning

confidence: 99%

“… ( a ) Microphotograph of the thermopile sensor and ( b ) photograph of the packaged device presented in [ 54 ]. …”

Section: Figurementioning

confidence: 99%

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Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

2021

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“…Compared to undoped polysilicon, heavily doped polysilicon has higher Seebeck coefficient, lower electrical resistivity and thermal conductivity. Therefore, heavily doped polysilicon has attracted wide research interest for applications of thermoelectric power generators [ 8 , 9 ]. In thermopile devices, heavily doped polysilicon is used as thermocouple material due to its CMOS-compatibility and perfect thermoelectric performance.…”

Section: Introductionmentioning

confidence: 99%

The Study of Reactive Ion Etching of Heavily Doped Polysilicon Based on HBr/O2/He Plasmas for Thermopile Devices

Zhou

Mao

et al. 2020

Materials

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Heavily doped polysilicon layers have been widely used in the fabrication of microelectromechanical systems (MEMS). However, the investigation of high selectivity, anisotropy, and excellent uniformity of heavily doped polysilicon etching is limited. In this work, reactive ion etching of undoped and heavily doped polysilicon-based hydrogen bromide (HBr) plasmas have been compared. The mechanism of etching of heavily doped polysilicon is studied in detail. The final results demonstrate that the anisotropy profile of heavily doped polysilicon can be obtained based on a HBr plasma process. An excellent uniformity of resistance of the thermocouples reached ± 2.11%. This technology provides an effective away for thermopile and other MEMS devices fabrication.

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Infrared Non‐Invasive Exhaled Biomarker Sensing: A Review

Ranu,

Rahman

et al. 2023

Advanced Sensor Research

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Exhaled breath analysis is considered an effective tool for diagnosing the patient's metabolic status because of its non‐invasive nature. Gas chromatography‐mass spectrometry (GC‐MS) and other mass spectrometry techniques are widely used for exhaled breath analysis. Nevertheless, the requirement of a handheld device for real‐time analysis and rapid processing time of multiple samples leads to advancing infrared (IR) based breath gas sensing techniques. Herein, the IR gas sensing technologies are discussed with a focus on non‐dispersive infrared (NDIR), photoacoustic (PAS), and tunable diode laser absorption spectroscopy (TDLAS) gas sensing technologies because of their highly selective gas detection among compound gases (mixture of VOCs), as well as their corresponding sensing mechanisms and characteristics, for real‐time monitoring of exhaled biomarkers. Carbon dioxide, acetone, ammonia, nitric oxide, methane, and ethylene are the significant biomarkers elaborated in this work with their respective clinical applications and the significance of non‐invasive real‐time monitoring using IR detectors. Challenges in selectivity and clinical trials leads to focus on this review. Current market analysis, present status of different techniques to detect specific biomarkers and other challenges with their possible solutions discussed in this review aid in developing highly selective IR‐based handheld breath VOC analyzers for early diagnosis and screening.

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Study on a High Performance MEMS Infrared Thermopile Detector

Cited by 21 publications

References 12 publications

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

Thermal Sensors for Contactless Temperature Measurements, Occupancy Detection, and Automatic Operation of Appliances during the COVID-19 Pandemic: A Review

The Study of Reactive Ion Etching of Heavily Doped Polysilicon Based on HBr/O2/He Plasmas for Thermopile Devices

Infrared Non‐Invasive Exhaled Biomarker Sensing: A Review

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