Study on growth processes of particles in germane radio frequency discharges using laser light scattering and scanning electron microscopic methods

Kawasaki, Hiroharu; Kida, Junichirou; Sakamoto, Kazutaka; Fukuzawa, T.; Shiratani, Masaharu; Watanabe, Yoshihisa

doi:10.1063/1.367420

Cited by 31 publications

(17 citation statements)

References 19 publications

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“…(These narrow size distributions are typically referred to as monodisperse though all nanoparticle population distributions always have a finite width.) Yet many experimental studies have strongly suggested that under some conditions coagulation in nonthermal plasmas does indeed occur. − ,,− …”

Section: Fundamentals Of Nonthermal Plasmasmentioning

confidence: 99%

Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

et al. 2016

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Nonthermal plasmas have emerged as a viable synthesis technique for nanocrystal materials. Inherently solvent and ligand-free, nonthermal plasmas offer the ability to synthesize high purity nanocrystals of materials that require high synthesis temperatures. The nonequilibrium environment in nonthermal plasmas has a number of attractive attributes: energetic surface reactions selectively heat the nanoparticles to temperatures that can strongly exceed the gas temperature; charging of nanoparticles through plasma electrons reduces or eliminates nanoparticle agglomeration; and the large difference between the chemical potentials of the gaseous growth species and the species bound to the nanoparticle surfaces facilitates nanocrystal doping. This paper reviews the state of the art in nonthermal plasma synthesis of nanocrystals. It discusses the fundamentals of nanocrystal formation in plasmas, reviews practical implementations of plasma reactors, surveys the materials that have been produced with nonthermal plasmas and surface chemistries that have been developed, and provides an overview of applications of plasma-synthesized nanocrystals.

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Section: Fundamentals Of Nonthermal Plasmasmentioning

confidence: 99%

Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

et al. 2016

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“…Coagulation coefficients (effectively, rate constants) for coagulation between particles of dissimilar sizes are largerand as the size dissimilarity increases, they become much larger-than for coagulation of same-sized particles. While Coulombic repulsion between unipolar negatively charged particles may in most cases make coagulation insignificant for dusty plasmas containing micrometer-size particles, a number of studies have indicated that coagulation is important in nanodusty plasmas [11,24,[28][29][30][31][32][33][34]. And, unlike the case in neutral aerosols, the charge states of particles are obviously of crucial importance for coagulation rates.…”

Section: Introductionmentioning

confidence: 99%

Sectional modeling of nanoparticle size and charge distributions in dusty plasmas

Agarwal¹,

Girshick²

2012

Plasma Sources Sci. Technol.

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Sectional models of the dynamics of aerosol populations are well established in the aerosol literature but have received relatively less attention in numerical models of dusty plasmas, where most modeling studies have assumed the existence of monodisperse dust particles. In the case of plasmas in which nanoparticles nucleate and grow, significant polydispersity can exist in particle size distributions, and stochastic charging can cause particles of given size to have a broad distribution of charge states. Sectional models, while computationally expensive, are well suited to treating such distributions. This paper presents an overview of sectional modeling of nanodusty plasmas, and presents examples of simulation results that reveal important qualitative features of the spatiotemporal evolution of such plasmas, many of which could not be revealed by models that consider only monodisperse dust particles and average particle charge. These features include the emergence of bimodal particle populations consisting of very small neutral particles and larger negatively charged particles, the effects of size and charge distributions on coagulation, spreading and structure of the particle cloud, and the dynamics of dusty plasma afterglows.

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“…Powder growth in SiH 4 discharge takes place in the time scale of the order of seconds [8]. In GeH 4 discharge there are reports of faster growth (order of tens of milliseconds) of the observable powders within the plasma [9]. Our study revealed a quite important observation that the powder formation within a discharge containing GeH 4 is even faster.…”

Section: Discussionmentioning

confidence: 67%

High diffusion length silicon germanium alloy thin films deposited by pulsed rf PECVD method

Chaudhuri¹,

Bhaduri²,

Bandyopadhyay³

et al. 2008

Journal of Non-Crystalline Solids

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Study on growth processes of particles in germane radio frequency discharges using laser light scattering and scanning electron microscopic methods

Abstract: Effects of micro-and macro-plasma-sheath electric fields on carbon nanotube growth in a cross-field radiofrequency discharge Determination of the size, optical index and density of particles in an argon-silane radio-frequency discharge

Cited by 31 publications

References 19 publications

Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

Sectional modeling of nanoparticle size and charge distributions in dusty plasmas

High diffusion length silicon germanium alloy thin films deposited by pulsed rf PECVD method

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