2019
DOI: 10.1007/978-981-13-5841-8_70
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Study on Information and Integrated of MES Big Data and Semiconductor Process Furnace Automation

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Cited by 13 publications
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“…An important evolution in the structure of the industrial economy that can allow personnel production can change the overall economic dimension. Figure 1 shows the evolution from Industry 1.0 to Industry 4.0 [5].…”
Section: Smart Manufacturingmentioning
confidence: 99%
“…An important evolution in the structure of the industrial economy that can allow personnel production can change the overall economic dimension. Figure 1 shows the evolution from Industry 1.0 to Industry 4.0 [5].…”
Section: Smart Manufacturingmentioning
confidence: 99%