Study on nanocrystalline Cr2O3 films deposited by arc ion plating: II. Mechanical and tribological properties

Wang, Tie‐Gang; Jeong, Dawoon; Liu, Yanmei; Wang, Qimin; Iyengar, Srinivasan; Melin, Solveig; Kim, Kwang Ho

doi:10.1016/j.surfcoat.2011.10.026

Cited by 57 publications

(20 citation statements)

References 43 publications

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“…The maximum value of Si was only 2.39 at.% in this work and therefore, incomplete coverage led to a lower hardness. Figure 9a, the friction coefficient rapidly increased in the initial running-in phase, which is believed to be the result of a transition in contact condition from two-body abrasion to interfacial sliding [46]. After lasting for 600 cycles, the transition from the running-in phase to a steady-state phase was obtained.…”

Section: Mechanical and Tribological Performancesmentioning

confidence: 92%

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Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

et al. 2017

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CrN and Cr-Al-Si-N coatings were deposited on SUS304 and Si-wafers by a hybrid coating system. The Cr and Al-Si target were connected to the cathode arc ion plating (AIP) and high power impulse magnetron sputtering (HiPIMS), respectively. Various Al and Si contents in the coatings were obtained by changing the power of Al-Si target from 0 to 1 kW. The results demonstrated a face-centered cubic structure in all of the coatings. With increasing Al-Si target power, both the density and mean diameter of the macroparticles on the coating surface declined. As Al and Si contents increased, the microstructure of the Cr-Al-Si-N coatings evolved from a dense column structure, to a finer grain column structure, and then to a compact granular-like structure. The hardness of the coatings increased from 21.5 GPa for the pure CrN coating, to a maximum value of~27 GPa for the Cr-Al-Si-N coating deposited at 0.4 kW, which was mainly attributed to the solid solution strengthening and increased residual stress. The addition of Al and Si contents led to enhanced wear resistance against alumina balls at both room and elevated temperatures. Meanwhile, the Cr-Al-Si-N coatings also exhibited an excellent resistance to high-temperature oxidation at 800 and 1000 • C, and improved corrosion resistance, as compared with CrN coatings.

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Section: Mechanical and Tribological Performancesmentioning

confidence: 92%

“…Secondly, the defect density and grain refinement are two other factors that influence film hardness. According Wang's report [46], defects including porosities, macroparticles, etc. can deteriorate the mechanical properties of the films.…”

Section: Mechanical and Tribological Performancesmentioning

confidence: 99%

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

et al. 2017

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“…As can be seen, an increase in the deposition time and substrate temperature cause an increase of this quantity. The hardness and mechanical properties of films can be affected by different parameters such as grain size, crystallographic orientations, film density, lattice parameters, and stoichiometry [1,10,12,18]. Although the variation of grain size with the deposition time is not large, the increase of hardness can be attributed to (i) film growth (ii) the increase of density or elimination of voids, (iii) improvement of crystal quality with increasing deposition time.…”

Section: Surface Morphology and Edxmentioning

confidence: 99%

Influence of controlled deposition rate on mechanical properties of sputtered Ti thin films for MEMS application

Venkatesan¹,

Ramu

2016

Materials Science-Poland

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This work investigates the influence of titanium thin films on the mechanical properties of AA 2024 substrates. The Scanning Electron Microscope (SEM) measurements confirm that the surface morphology of Ti thin film depends on controlled deposition rate and the energy-dispersive X-ray (EDX) result reveals the uniform dispersion of Ti coating over the sample. Increase in film thickness on the material surface is connected with improved hardness, superior adhesion and minimum surface roughness which makes the coated material more prominent for MEMS application. It is also found that the XRD patterns of the Ti thin films are characterized by hexagonal close packed (HCP) structure with (1 1 1) as the preferred crystallographic orientation for the film of a thickness of 154 µm coated on the substrate at temperature of 673 K.

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“…Film hardness and mechanical properties can be affected by different parameters such as grain size, crystallographic orientations, film density, lattice parameters, and stoichiometry (Ref [28][29][30][31]. In addition, close packed structures and small grains (with more grain boundaries) result in higher hardness.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

Study of Electrical, Mechanical, and Tribological Properties of CrN x Thin Films as a Function of Sputtering Conditions

Khojier

Savaloni

Zolghadr

et al. 2014

J. of Materi Eng and Perform

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The influences of chemical composition and deposition power on the electrical, mechanical, and tribological properties of sputtered chromium nitride (Cr-N) thin films that can be used for development of cryogenic temperature sensor are investigated. Cr-N thin films were deposited by DC reactive magnetron sputtering technique under various nitrogen gas flows (5-20 sccm) and deposition powers (200 and 250 W). Results of chemical composition showed that films produced with 5 and 10 sccm flow of nitrogen gas were substoichiometric, while at higher flows they were overstoichiometric. The surface morphology investigation showed that grains size and surface roughness increase with nitrogen gas flow, whereas deposition power has an inverse effect on both of these parameters. The electrical results demonstrated that the substoichiometric films had a positive temperature coefficient of resistivity, and the overstoichiometric films showed a negative temperature coefficient of resistivity. The films produced at higher deposition power of 250 W showed higher hardness and lower friction coefficient and scratch volume, while variation of nitrogen gas flow in the range of 5-20 sccm did not affect these properties, significantly.

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Study on nanocrystalline Cr2O3 films deposited by arc ion plating: II. Mechanical and tribological properties

Cited by 57 publications

References 43 publications

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

Microstructure, Mechanical, Oxidation and Corrosion Properties of the Cr-Al-Si-N Coatings Deposited by a Hybrid Sputtering System

Influence of controlled deposition rate on mechanical properties of sputtered Ti thin films for MEMS application

Study of Electrical, Mechanical, and Tribological Properties of CrN x Thin Films as a Function of Sputtering Conditions

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