Study on SiO2 thin film modified by post hot isostatic pressing

Liu, Huasong; Wang, Lishuan; Jiang, Yugang; Li, Shida; Liu, Dandan; Ji, Yiqin; Zhang, Feng; Chen, Deying

doi:10.1016/j.vacuum.2017.11.018

Cited by 11 publications

(6 citation statements)

References 24 publications

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“…The container was degassed at 550 • C and then sealed by welding under a vacuum of 1 × 10 −3 Pa. their average sizes were 10 μm, 25 μm, and 50 μm, respectively. After vibration, the initial packing density of powder was 4.9 g/cm 3 . The container material was 45# low-carbon steel and its composition is shown in Table 2.…”

Section: Methodsmentioning

confidence: 99%

“…Hot isostatic pressing (HIP) is a powerful process to densify metal powder into a desirable shape, microstructure, and properties. The relative density (RD) and distribution of an HIPed part are highly dependent on temperature [1,2], pressure [3][4][5], soaking time [6,7], and container geometry [8,9] since the densification process is primarily driven by elemental diffusion and the creep deformation of powders [10][11][12][13][14]. To densify it close to the theoretical density, in practice cases, a trial-and-error methodology is often carried out to obtain the optimized processing parameters and container geometry, which is highly costly and labor-intensive [15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Modeling of Metal Powder Densification under Hot Isostatic Pressing

Wang,

Srivatsa,

et al. 2024

Materials

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The consolidation of metal powders is a complex thermomechanical process, and the temperature has a significant effect on the density distribution in the compact. The consolidation process of metal powders with an average particle size of 10 μm, 25 μm, and 50 μm under hot isostatic pressure was simulated by finite element modeling. The distribution and evolution of the relative density after being hot isostatic pressing (HIP) under 1050 °C/130 MPa/4 h, 1150 °C/130 MPa/4 h, and 1250 °C/130 MPa/4 h conditions were simulated, respectively. The experimental data of HIP at 1050 °C/130 MPa/4 h were used to verify the modeling results via the geometric change in the container. The relative density difference between the simulated results and the experimental results at different positions was less than 2%. This methodology called “modeling prediction, experimental validation” can accelerate experimental discovery in an economic manner.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Modeling of Metal Powder Densification under Hot Isostatic Pressing

Wang,

Srivatsa,

et al. 2024

Materials

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“…The pressure is applied from all directions equally, which makes the process "isostatic". The primary governing parameters of HIPing are inert atmosphere, temperature, pressure, and cycle time 27 .…”

Section: Introductionmentioning

confidence: 99%

On the hot isostatic pressing of Inconel 625 structures built using laser powder bed fusion at higher layer thickness

Nayak

Jinoop

Paul

et al. 2022

Int J Adv Manuf Technol

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This paper reports the effect of Hot Isostatic Pressing (HIPing) on the porosity, microstructure and mechanical properties of Laser Powder Bed Fusion (LPBF) IN625 structures built at a higher layer thickness of 100 µm. It is observed that the process-induced pores/voids of volume fraction (V f ) 0.43% in as-built IN625 structures are reduced signi cantly to ~ 0.01% after HIPing treatment. The microstructure is changed from ne columnar dendrites to coarse equiaxed dendrites. The microstructural analysis of as-built structures reveals the presence of cellular/ dendritic growth along with elemental segregation of Nb, Si and C and precipitation of Nb-rich carbides. Whereas, coarse recrystallized microstructure along with elemental segregation of Si and precipitation of Nb, Mo and Cr rich carbides are observed in Hot Isostatic Pressed (HIPed) samples. HIPed structures exhibit lower tensile s trength, higher ductility, and lower anisotropy as compared to LPBF built structures. There is a reduction in the Vickers micro-hardness of IN625 samples after HIPing and the values are observed to be similar to their conventional counterparts. Further, an increase in the energy storage capacity of the material is observed after HIPing treatment through Automated Ball Indentation (ABI ® ) studies. The study paves a way to develop ~100% dense, defect-free and isotropic engineering components using LPBF.

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“…SiO 2 thin films have many advantages, such as high light transmittance, good insulation, good dielectric properties, and strong corrosion resistance. At present, SiO 2 thin films have been widely used in optical film devices, electronic devices, integrated devices, sensors, and other fields [1][2][3][4][5][6]. However, several new applications for SiO 2 thin films will require conformal coverage (good conformality) of micro-and nano-scale features in the substrate.…”

Section: Introductionmentioning

confidence: 99%

Optical Constant and Conformality Analysis of SiO2 Thin Films Deposited on Linear Array Microstructure Substrate by PECVD

et al. 2021

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SiO2 thin films are deposited by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) technique using SiH4 and N2O as precursor gases. The stoichiometry of SiO2 thin films is determined by the X-ray photoelectron spectroscopy (XPS), and the optical constant n and k are obtained by using variable angle spectroscopic ellipsometer (VASE) in the spectral range 380–1600 nm. The refractive index and extinction coefficient of the deposited SiO2 thin films at 500 nm are 1.464 and 0.0069, respectively. The deposition rate of SiO2 thin films is controlled by changing the reaction pressure. The effects of deposition rate, film thickness, and microstructure size on the conformality of SiO2 thin films are studied. The conformality of SiO2 thin films increases from 0.68 to 0.91, with the increase of deposition rate of the SiO2 thin film from 20.84 to 41.92 nm/min. The conformality of SiO2 thin films decreases with the increase of film thickness, and the higher the step height, the smaller the conformality of SiO2 thin films.

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Study on SiO2 thin film modified by post hot isostatic pressing

Cited by 11 publications

References 24 publications

Modeling of Metal Powder Densification under Hot Isostatic Pressing

Modeling of Metal Powder Densification under Hot Isostatic Pressing

On the hot isostatic pressing of Inconel 625 structures built using laser powder bed fusion at higher layer thickness

Optical Constant and Conformality Analysis of SiO2 Thin Films Deposited on Linear Array Microstructure Substrate by PECVD

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