2021
DOI: 10.1016/j.vacuum.2021.110357
|View full text |Cite
|
Sign up to set email alerts
|

Study on the characteristics of quadrupole mass spectrometer by the UHV partial pressure standard

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(2 citation statements)
references
References 24 publications
0
2
0
Order By: Relevance
“…With a signal gain of around 3 decades, this allows for trace detection and distinction from background noise in the first place. However, especially in newly installed SEMs, such as the one used for this study, aging and degradation lead to a decrease in ion current and SEM gain over time, which can be roughly adjusted for by spectrometer bake‐out and applying a higher voltage [93–95] . Since both H 2 and CO 2 signals are also amplified by the SEM, their calibration sensitivity, i. e. the slope of their calibration curves, is known, and a relative comparison can be made between the slopes of each gas for various measurements.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…With a signal gain of around 3 decades, this allows for trace detection and distinction from background noise in the first place. However, especially in newly installed SEMs, such as the one used for this study, aging and degradation lead to a decrease in ion current and SEM gain over time, which can be roughly adjusted for by spectrometer bake‐out and applying a higher voltage [93–95] . Since both H 2 and CO 2 signals are also amplified by the SEM, their calibration sensitivity, i. e. the slope of their calibration curves, is known, and a relative comparison can be made between the slopes of each gas for various measurements.…”
Section: Resultsmentioning
confidence: 99%
“…However, especially in newly installed SEMs, such as the one used for this study, aging and degradation lead to a decrease in ion current and SEM gain over time, which can be roughly adjusted for by spectrometer bake-out and applying a higher voltage. [93][94][95] Since both H 2 and CO 2 signals are also amplified by the SEM, their calibration sensitivity, i. e. the slope of their calibration curves, is known, and a relative comparison can be made between the slopes of each gas for various measurements. The (CN) 2 signal is then normalized between measurements by this relative factor, as detailed in Figure S2a and b, Table S3 (Supporting Information), and the literature.…”
Section: Initial Gassing Measurements and Considerationsmentioning
confidence: 99%