Study on the mechanism of ultrasonic-assisted water confined laser micromachining of silicon

Zhou, Jia; Xu, Runze; Jiao, Hui; Bao, Jianmin; Liu, Qing-yuan; Long, Yuhong

doi:10.1016/j.optlaseng.2020.106118

Cited by 25 publications

(5 citation statements)

References 25 publications

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“…liquid resistance after its formation, and the velocity decreased first, but as the bubble shape became stable, the bubble velocity increased until the resultant force of the bubble reached equilibrium [20]. At present, pure water or deionized water is commonly used in LIPMM as its liquid medium [21], but there are few articles on the formation of bubbles and the quality of microchannels in other liquid media. Since different liquid media have different thermal physical properties, the bubble behavior generated by LIPMM will show the obvious difference in the different liquid media.…”

Section: Methodsmentioning

confidence: 99%

“…At present, pure water or deionized water is commonly used in LIPMM as its liquid medium [21], but there are few articles on the formation of bubbles and the quality of microchannels in other liquid media. Since different liquid media have different thermal physical properties, the bubble behavior generated by LIPMM will show the obvious difference in the different liquid media.…”

Section: Introductionmentioning

confidence: 99%

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Comparative Analysis of Bubbles Behavior in Different Liquids by Laser-Induced Plasma Micromachining Single-Crystal Silicon

et al. 2022

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Laser-induced plasma micromachining (LIPMM) can be used to fabricate high-quality microstructures of hard and brittle materials. The liquid medium of the LIPMM process plays a key role in inducing the plasma and cooling the materials, but the liquid medium is overheated which induces lots of bubbles to defocus the laser beam and reduce machining stability. In this paper, a comparative investigation on bubble behavior and its effect on the surface integrity of microchannels in three types of liquids and at different depths during LIPMM has been presented. Firstly, the formation mechanism of microbubbles was described. Secondly, a series of experiments were conducted to study the number and maximum diameter of the attached bubbles and the buoyancy movement of floating bubbles in the LIPMM of single-crystal silicon under deionized water, absolute ethyl alcohol, and 5.6 mol/L phosphoric acid solution with a liquid layer depth of 1–5 mm. It was revealed that the number and maximum diameter of attached bubbles in deionized water were the highest due to its high tension. Different from the continuous rising of bubbles at the tail of the microchannels in the other two liquids, microbubbles in 5.6 mol/L phosphoric acid solution with high viscosity rose intermittently, which formed a large area of bubble barrier to seriously affect the laser focus, resulting in a discontinuous microchannel with an unablated segment of 26.31 μm. When the depth of the liquid layer was 4 mm, absolute ethyl alcohol showed the advantages in narrow width (27.15 μm), large depth (16.5 μm), and uniform depth profile of the microchannel by LIPMM. This was because microbubbles in the anhydrous ethanol quickly and explosively spread towards the edge of the laser processing zone to reduce the bubble interference. This research contributes to a better understanding of the behavior and influence of bubbles in different liquid media and depths in LIPMM of single-crystal silicon.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Comparative Analysis of Bubbles Behavior in Different Liquids by Laser-Induced Plasma Micromachining Single-Crystal Silicon

et al. 2022

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“…Recently, the usage of ultrasonic-treatment has shown dissimilar spreading characteristics, in the wetting process of water/substrate 14 . The traditional ultrasonic-treatment is considered to be clean and efficient 15 . Now being experimentally proved, the ultrasonic-assisted methods are capable of manipulating fluids with normally flowabilities, through inputting acoustic waves with several levels of frequencies 16 .…”

Section: Introductionmentioning

confidence: 99%

The Morphology of al Droplet in an Ultrasonic Oscillation Field: Kinetic and Equilibrium Thermodynamic Analysis

Liang

Yang

et al. 2023

Mat. Res.

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Wetting of metal droplet on the solid substrate is a fundamental phenomenon which is applicable to the surface chemistry. When an oscillation field is included in the wetting condition, the wetting process shows significant advancing and receding behaviors. Also, the use of ultrasonic oscillation field is promising in welding. However, some odd morphologies led by the ultrasonic-treatment have shown wetting kinetics which have not been fully investigated.The high frequency ultrasonic vibration brings hysteresis to the contact angle, whose extra energy is attributed by the oscillation field. The ultrasonic wetting process is excited by the 20 kHz frequency periodic oscillation, during which droplet is swaying cyclically. However, after capturing the transformation of droplet morphologies, it is found that the frequency of each swaying cycle is identified to be 180 ms. Theoretical investigations have also quantitively proved that the energy for the contact angle decrease origins from the ultrasonic field, and the wettability is in a great enhancement. Thermal and kinetic effects of ultrasonic are investigated by making theoretical calculations, the 20 kHz ultrasonic field lasting for 5 seconds. Thermodynamics, vibrational mechanics, and interfacial phenomena affect the sonochemistry of wetting.

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“…To solve this issue, the laser ablation inside water has been developed as an alternative to overcome the thermal damage caused by lasers. [ 31–36 ] By using this technique, a workpiece is submerged or covered by a layer of water during the ablation. As the ablation process is performed inside water, the excessive heat and cut debris can be carried away by water circulation around the cut region.…”

Section: Introductionmentioning

confidence: 99%

Anisotropic Superhydrophobic Properties of Bioinspired Surfaces by Laser Ablation of Metal Substrate inside Water

Zhao

Jiang

et al. 2021

Adv Materials Inter

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Water droplet unidirectional adhesion, wetting, and transport on the asymmetric superhydrophobic surfaces have attracted much research interest in theory analyses and applications. In this study, inspired by the butterfly wings and lotus leaf, a novel anisotropic superhydrophobic surface with different tilt angles of the wedge‐shaped structures is prepared on aluminum surfaces via laser ablation inside water. It is demonstrated experimentally that the resistant force of water droplets on the bioinspired surfaces is different along the tilt direction of the wedge‐shaped structure and the inverse direction. The sliding and bouncing behaviors of water droplets on different bioinspired wedge‐shaped structure surfaces are simulated and tested to understand better the mechanism of the rolling and bouncing droplets induced by asymmetric wedge‐shaped structures. Furthermore, the effect of the tilt wedge‐shaped structures on the anisotropic superhydrophobic properties is revealed from the mechanical point of view. The relationship between the anisotropic superhydrophobic properties and the tilt angle of the wedge‐shaped structure is investigated.

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Study on the mechanism of ultrasonic-assisted water confined laser micromachining of silicon

Cited by 25 publications

References 25 publications

Comparative Analysis of Bubbles Behavior in Different Liquids by Laser-Induced Plasma Micromachining Single-Crystal Silicon

Comparative Analysis of Bubbles Behavior in Different Liquids by Laser-Induced Plasma Micromachining Single-Crystal Silicon

The Morphology of al Droplet in an Ultrasonic Oscillation Field: Kinetic and Equilibrium Thermodynamic Analysis

Anisotropic Superhydrophobic Properties of Bioinspired Surfaces by Laser Ablation of Metal Substrate inside Water

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