The present work demonstrated the effects of isothermal oxidation temperature (750 • C∼870 • C) and water quenching cycle times (1∼3) on properties of IrO x pH electrodes. Property tests of the fabricated electrodes showed that electrodes developed by 800 • C isothermal heating and water quenching for 3 times (H&Q 3) had excellent near Nernst E-pH relationship, relatively faster response rate and the minimum potential drift in long-term stability test. Surface and cross-section morphologies, confocal laser scanning microscopy, electrochemical impedance spectroscopy (EIS) and X-ray photoelectron spectroscopy (XPS) were employed to characterize the electrodes to explore the reason for their excellent properties. Surface morphology showed that the iridium oxide film (IROF) made by H&Q 3 at 800 • C had larger surface roughness, and well-defined homogeneous dense inner layer and loose porous outer layer. Besides, it had the minimum reaction resistance in both acid and alkaline buffers, and contained more effective compositions compared to electrodes fabricated by other conditions. Thus H&Q 3 at 800 • C was suggested to obtain a better integrated pH sensing property. Furthermore, a potential compensation method with a specially designed probe structure was proposed to correct possible errors caused by the potential drift of IrO x pH electrode in long-term pH monitoring. pH, used to reflect the grade of solvents in chemical laboratory since 1909, is an important parameter in many fields such as chemical industry, bio-industry as well as some fundamental research like electrodeposition/electrolysis and corrosion process.1-3 The glass pH electrode is a mature routine tool presenting good sensitivity, excellent stability and long life time in pH sensing. However, some of its disadvantages restrict its usage in some particular applications due to the physical nature of the glass membrane.The alternative pH electrodes include ion-sensitive field-effect transistor (ISFET) pH sensors, 4,5 optical fiber pH sensors, 6,7 hydrogel film pH sensors, [8][9][10][11][12] metal/metal oxide sensors, 13-16 etc. By comparing sensitivity, Nernst response range, ion selectivity, interference of oxidation, the iridium oxide pH electrode has been demonstrated to be the most promising one among all kinds of pH sensors. [17][18][19] The reported fabrication approaches of IrO x pH electrode include electrochemical cyclic voltammetry (CV), 19-22 electrodeposition, 23-25 radio frequency (RF) magnetron sputtering deposition, 26-30 and thermal oxidation.14,31 Among which, the electrode produced by thermal oxidation exhibited excellent overall performance, including wide E-pH relationship range, fast response time and long term stability.32-36 Wang et al. developed carbonate melt oxidation to coat Ir through the oxidation of Ir wires in a carbonate melt at 870• C for 5 hours.31 Hitchman et al. produced IrO x -electrodes by direct thermal oxidation in air at 800• C. 34 Both surface films of fabricated by the above conditions showed obvious cracks...