2011
DOI: 10.1007/s11664-011-1589-x
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Study on the Thermoelectric Properties of CVD SiC Deposited with Inert Gases

Abstract: We deposited silicon carbide (SiC) by the chemical vapor deposition (CVD) method using the inert gases Ar and He. It was confirmed that SiC deposited with inert gases had a porous microstructure and high carbon content. We also studied the thermoelectric properties. SiC deposited with He gas had lower electrical and thermal conductivity compared with SiC deposited with Ar gas. Both samples using Ar and He exhibited a negative Seebeck coefficient, indicating n-type semiconductor behavior. The calculated figure … Show more

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Cited by 8 publications
(5 citation statements)
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“…Besides borides, another group of materials which has been investigated for the use as high temperature thermoelectric applications due to their good thermal stability are carbides [938][939][940][941][942][943][944][945][946][947][948][949][950][951]. Efforts have been focused on the compound SiC which exists in several different modifications, the most prominent being the hexagonal 6-H α-SiC [938,939,947] and the cubic 3-C β-SiC [938,939,[944][945][946][948][949][950]. Depending on the synthesis conditions both p-type and n-type behavior have been reported.…”
Section: Boride and Carbide Thermoelectricsmentioning
confidence: 99%
“…Besides borides, another group of materials which has been investigated for the use as high temperature thermoelectric applications due to their good thermal stability are carbides [938][939][940][941][942][943][944][945][946][947][948][949][950][951]. Efforts have been focused on the compound SiC which exists in several different modifications, the most prominent being the hexagonal 6-H α-SiC [938,939,947] and the cubic 3-C β-SiC [938,939,[944][945][946][948][949][950]. Depending on the synthesis conditions both p-type and n-type behavior have been reported.…”
Section: Boride and Carbide Thermoelectricsmentioning
confidence: 99%
“…Interestingly, they evidenced a huge reduction in thermal conductivity of more than an order of magnitude when compared to pristine graphene because of the mass fluctuation scattering of phonons (see figure 20(c)) due to a huge mass difference between the host C atom and the substituted Si atom. Also, on the study on effect of inert gases on the thermoelectric performance, SiC deposited with He gas had numerous pores and larger carbon content with higher Seebeck coefficient and lower thermal conductivity when compared to the ones deposited with H 2 and N 2 gas [528]. Nevertheless, metal organic chemical vapour deposition (MOCVD) is the most frequent approach for producing Bi 2 Te 3 /Sb 2 Te 3 superlattices, and it shows tremendous promise in the field of thin film creation because of the abundance of Te organometallic precursors and low breaking temperatures [529].…”
Section: Chemical Vapour Depositionmentioning
confidence: 99%
“…Furthermore, it is expected to become an application material in the field of thermoelectric power at high temperatures. [8][9][10][11] In these fields, the thermal conduction properties are usually considered critical metrics for evaluating the performance of SiC materials. High thermal conductivity is conducive to rapid heat transfer, while low thermal conductivity is conducive to improving the thermoelectric properties of the material.…”
Section: Introductionmentioning
confidence: 99%