Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

Sadek, K.; Moussa, Walied A.

doi:10.3390/s7030319

Cited by 10 publications

(4 citation statements)

References 35 publications

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“…Recently, optical methods have opened a new door for detecting CO. Some researchers have used laser and infrared based detection using the light absorption principle [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

Carbon Monoxide Sensing Technologies for Next-Generation Cyber-Physical Systems

Nandy

Coutu

Ababei

2018

Sensors

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Carbon monoxide (CO) is a toxic gas, and environmental pollutant. Its detection and control in residential and industrial environments are necessary in order to avoid potentially severe health problems in humans. In this review paper, we discuss the importance of furthering research in CO sensing technologies for finding the proper material with low-range detection ability in very optimum condition. We build our discussion through the perspective of a cyber-physical system (CPS) modeling framework, because it provides a comprehensive framework to model and develop automated solutions for detection and control of poisonous chemical compounds, such as the CO. The most effective CO sensors, then, can be used in CPS network to provide a pathway for real-time monitoring and control in both industrial and household environment. In this paper, first, we discuss the necessity of CO detection, the proposal of a basic CPS framework for modeling and system development, how the CPS-CO model can be beneficiary to the environment, and a general classification of the various CO detection mechanisms. Next, a broad overview emphasizes the sensitivity, selectivity, response and recovery time, low concentration detection ability, effects of external parameters and other specifications that characterize the performance of the sensing methods proposed so far. We will discuss recent studies reported on the use of metal oxide semiconductor (MOS) sensing technologies for the detection of CO. MOS based micro-sensors play an important role in the measurement and monitoring of various trace amounts of CO gas. These sensors are used to sense CO through changes in their electrical properties. In addition to MOS based sensors, optical sensing methods have recently become popular, due to their increased performance. Hence, a brief overview of newly proposed optical based CO detection methods is provided as well.

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Section: Introductionmentioning

confidence: 99%

Carbon Monoxide Sensing Technologies for Next-Generation Cyber-Physical Systems

Nandy

Coutu

Ababei

2018

Sensors

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“…is the low concentration CO gas detection, which occurs constantly in the residential areas [14][15][16][17][18]. This is a really challenging technology in order to detect those less concentration CO gas present in the indoor environment and also absorption of such kind of gases leads severe health issue to the human society.…”

Section: In An Environment the Various Types Of Hazardous Gases Are P...mentioning

confidence: 99%

Strategic report on MEMS based carbon monoxide sensor technology for environmental air quality monitoring using unmanned aerial vehicle

2022

IJATEE

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“…Residual stresses are also developed during the microfabrication process of sensor devices, e.g. MEMS gas sensors, which can seriously affect their operating performance and reliability, as they can cause rupture and/or delamination of the thin film (Sadek and Moussa, 2007).…”

Section: Introductionmentioning

confidence: 99%

Synthesis, structural and nanomechanical properties of cobalt based thin films

Koumoulos

Tsikourkitoudi

Kartsonakis

et al. 2015

International Journal of Structural Integrity

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Purpose – The purpose of this paper is to produce cobalt (Co)-based thin films by metalorganic chemical vapor deposition (CVD) technique and then to evaluate structural and mechanical integrity. Design/methodology/approach – Co-based thin films were produced by metalorganic CVD technique. Boronizing, carburization and nitridation of the produced Co thin films were accomplished through a post-treatment stage of thermal diffusion into as-deposited Co thin films, in order to produce cobalt boride (Co2B), cobalt carbide and cobalt nitride thin films in the surface layer of Co. The surface topography and the crystal structure of the produced thin films were evaluated through scanning electron microscopy and X-ray diffraction, respectively. The mechanical integrity of the produced thin films was evaluated through nanoindentation technique. Findings – The obtained results indicate that Co2B thin film exhibits the highest nanomechanical properties (i.e. H and E), while Co thin film has enhanced plasticity. The cobalt oxide thin film exhibits higher resistance to wear in comparison to the cobalt thin film, a fact that is confirmed by the nanoscratch analysis showing lower coefficient of friction for the oxide. Originality/value – This work is original.

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Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

Cited by 10 publications

References 35 publications

Carbon Monoxide Sensing Technologies for Next-Generation Cyber-Physical Systems

Carbon Monoxide Sensing Technologies for Next-Generation Cyber-Physical Systems

Strategic report on MEMS based carbon monoxide sensor technology for environmental air quality monitoring using unmanned aerial vehicle

Synthesis, structural and nanomechanical properties of cobalt based thin films

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