“…For the fully cleaned membranes, the scan strategy had no effect on the final pore size, since the hydrocarbon effect was no longer at play. Apart from silicon nitride, helium FIB milling has also been used to create nanopores in other free-standing membranes, with minimum pore diameter records as follows: 1.3 nm diameter in a 1 nm thick carbon nanomembrane [164], 2.6 nm diameter in single-layer graphene [145], 4 nm diameter in few-layer and monolayer hBN [152,166], and 1.3 nm diameter in monolayer MoS 2 [137]. Ion conductance and DNA translocation through helium FIB-milled graphene nanopores has been reported [167], as has the fabrication of suspended graphene nanomesh structures (3-4 nm pores on a pitch of ≤10 nm, Figure 6e) that demonstrated bandgap opening by quantum confinement [136].…”