2012
DOI: 10.2351/1.4718858
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Sub-100 nm material processing and imaging with a sub-15 femtosecond laser scanning microscope

Abstract: Low mean powers of 1–10 mW are sufficient for material nanoprocessing when using femtosecond laser microscopes. In particular, near infrared 12 fs laser pulses at peak TW/cm2 intensities, picojoule pulse energies, and 85 MHz repetition rate have been employed. Three-dimensional two-photon lithography as well as direct multiphoton ablation have been performed. Subwavelength sub-100 nm cuts have been realized in photoresists, silicon wafers, glass, polymers, metals, and biological targets. When reducing the mean… Show more

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Cited by 23 publications
(12 citation statements)
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“…The instrumental setup is described elsewhere. 12 Briefly, it consists of a modified inverted microscope with a galvanometric scanner unit and a piezoelectric stage for z positioning of the objective. An 85-MHz mode-locked titanium-sapphire laser (Integral Pro 400; FemtoLasers Produktions GmbH, Vienna, Austria) generating~10-fs pulses with an M-shaped spectral profile (centered at 800 nm) and a bandwidth of~95 nm was used for sample excitation.…”
Section: Flim and Shg Imagingmentioning
confidence: 99%
“…The instrumental setup is described elsewhere. 12 Briefly, it consists of a modified inverted microscope with a galvanometric scanner unit and a piezoelectric stage for z positioning of the objective. An 85-MHz mode-locked titanium-sapphire laser (Integral Pro 400; FemtoLasers Produktions GmbH, Vienna, Austria) generating~10-fs pulses with an M-shaped spectral profile (centered at 800 nm) and a bandwidth of~95 nm was used for sample excitation.…”
Section: Flim and Shg Imagingmentioning
confidence: 99%
“…2PPis the only fabrication technique in which the scaffold geometry may be controlled at the cell scale (10 μm) and with a very high spatial resolution (less than 1 μm). Non-biodegradable "structural" materials used to fabricate scaffolds by 2PPinclude vinyls [12], epoxies [13], acrylates [14] and hybrid inorganic-organic materials [15], many of which have proven to be biocompatible in the cell culture environment [16]. In recent work, we have developed structural microscaffolds, or niches, of various complex 3D architectures, which were laser-written directly on the glass bottom of the cell culture chamber, using a photoresist consisting of a solgel-synthesized silicon-zirconium hybrid inorganic-organic [17].…”
Section: Introductionmentioning
confidence: 99%
“…The laser source, a Ti-sapphire oscillator (Integral Pro 400, FemtoLasers Produktions GmbH), supplied 10-fs pulses at a repetition frequency of 85 MHz. The emission spectrum ranged from 700 nm to 870 nm with two maxima at 770 nm and 827 nm [6]. The laser beam was coupled into an inverted optical microscope (AxioObserver.D1, ZEISS) equipped with a galvanometric x-y scanning unit and piezodriven focusing optics.…”
Section: Methodsmentioning
confidence: 99%
“…An ultra-short pulsed laser has been proven to be a useful tool for micro-and nanoprocessing of various materials because of its high precision compared to other light sources [5] and its high peak intensity at low average power [1,6]. In addition, two-or multi-photon absorption at the focal volume of the laser beam facilitates a real 3D structuring of transparent specimens [1].…”
mentioning
confidence: 99%