SPIE Proceedings
 2012
DOI: 10.1117/12.916084
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Sub-atmospheric gas purification for EUVL vacuum environment control

Abneesh Srivastava
1
,
S. Jar Pereira
2
,
Thomas E. Gaffney
3
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Reduction of airborne molecular contamination on an extreme ultraviolet reticle dual pod using clean dry air purging technology

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et al. 2016
Microelectronic Engineering
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Reduction of airborne molecular contamination on an extreme ultraviolet reticle dual pod using clean dry air purging technology

Chiu1,
Hu
2
,
Shiue
3
et al. 2016
Microelectronic Engineering
6
0
1
0
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Advanced metrology and gas purifier yield improvement

Srivastava
1
2012
2012 SEMI Advanced Semiconductor Manufacturing Conference
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Parametric Optimization of Gas Purifiers: A Computational Fluid Dynamics (CFD) Modeling Approach

Chakraborty
1
,
Cook
2
,
Gipson
3
2019
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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