2004
DOI: 10.1007/s00339-004-2589-y
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Sub-micron patterning of solid materials with ultraviolet femtosecond pulses

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Cited by 35 publications
(15 citation statements)
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“…Femtosecond ultraviolet laser pulses are on demand for many spectroscopic applications studying ultrafast processes in photochemistry and photobiology [1]. Many challenging applications in material processing, such as laser processing via surface ablation [2], microprinting of biomaterials [3], long-period fibre grating fabrication [4], in-depth modification of transparent solids [5], laser mirostructuring [6], to mention a few, require femtosecond laser radiation with energy of tens of microjoules. Among the variety of nonlinear optical techniques to generate ultrashort light pulses in the ultraviolet, four-photon interactions in transparent isotropic media attract a steadily growing interest.…”
Section: Introductionmentioning
confidence: 99%
“…Femtosecond ultraviolet laser pulses are on demand for many spectroscopic applications studying ultrafast processes in photochemistry and photobiology [1]. Many challenging applications in material processing, such as laser processing via surface ablation [2], microprinting of biomaterials [3], long-period fibre grating fabrication [4], in-depth modification of transparent solids [5], laser mirostructuring [6], to mention a few, require femtosecond laser radiation with energy of tens of microjoules. Among the variety of nonlinear optical techniques to generate ultrashort light pulses in the ultraviolet, four-photon interactions in transparent isotropic media attract a steadily growing interest.…”
Section: Introductionmentioning
confidence: 99%
“…In such cases, application of short laser pulses with picosecond pulse durations or shorter is needed [3]. Applying short-wavelength irradiation ensures a further increased spatial resolution [4].…”
mentioning
confidence: 99%
“…Focus scanning offers the capability of creating arbitrary structures with great flexibility, but with a limited processing speed. Especially for the generation of periodic structures, the application of interference-or mask projection techniques [4][5][6][7] can significantly speed up the process, creating a large number of features simultaneously, using only moderate number of pulses. However, in order to get the required energy density, which conveniently overtakes the damage threshold of the ablated material, very high pulse energies or very high overall transmittance of the optical setup is required.…”
mentioning
confidence: 99%
“…This broadens the application potential of near-infrared ultrashort-pulse lasers in high-tech applications. For example, high-power picosecond laser pulses of fundamental and harmonic (up to fifth) frequencies will enable high-speed, high-precision micro-and nano-structuring of large surface areas on various materials with flat-top beams using diffraction optics and interference techniques [13]. Ultrashort laser pulses in the mid-IR spectral range can also open ways for 3D direct laser writing inside biological inside biological samples, polymer materials, and narrow-bandgap semiconductors which are opaque for visible and near-IR laser light [14].…”
Section: Introductionmentioning
confidence: 99%