2016
DOI: 10.1021/acsami.6b00606
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Submicrometer Hollow Bioglass Cones Deposited by Radio Frequency Magnetron Sputtering: Formation Mechanism, Properties, and Prospective Biomedical Applications

Abstract: This work reports on the unprecedented magnetron sputtering deposition of submicrometric hollow cones of bioactive glass at low temperature in the absence of any template or catalyst. The influence of sputtering conditions on the formation and development of bioglass cones was studied. It was shown that larger populations of well-developed cones could be achieved by increasing the argon sputtering pressure. A mechanism describing the growth of bioglass hollow cones is presented, offering the links for process … Show more

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Cited by 26 publications
(21 citation statements)
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“…Prior to deposition, the substrates were etched for 10 min in argon (Ar) plasma (0.3 Pa) produced by a wolfram plasmatron by applying a 0.4 kV DC bias voltage and a power of ~200 W, in order to remove the potential remnant impurities. Earlier studies have evidenced the positive role of this procedure on the adherence of the sputtered films [ 54 , 55 , 56 ]. The process was optimized in the past; longer etching times or higher plasma power value leading to morphological irregularities on substrate surface, which are unfavorable to an optimal growth of a film with minimized internal tensions.…”
Section: Methodsmentioning
confidence: 99%
“…Prior to deposition, the substrates were etched for 10 min in argon (Ar) plasma (0.3 Pa) produced by a wolfram plasmatron by applying a 0.4 kV DC bias voltage and a power of ~200 W, in order to remove the potential remnant impurities. Earlier studies have evidenced the positive role of this procedure on the adherence of the sputtered films [ 54 , 55 , 56 ]. The process was optimized in the past; longer etching times or higher plasma power value leading to morphological irregularities on substrate surface, which are unfavorable to an optimal growth of a film with minimized internal tensions.…”
Section: Methodsmentioning
confidence: 99%
“…FTIR spectra (Figure 4) indicated an intensity enhancement of ), determined by the Q Si 4 silicate units. SEM analysis of BG-coating surfaces ( Figure 5) revealed morphologies that were typical of amorphous structures deposited by radio-frequency magnetron sputtering, [51][52][53] characterization of in vitro-tested BG films…”
Section: Characterization Of Starting Bg Powder and As-sputtered Bg Cmentioning
confidence: 99%
“…This band is known to be highly sensitive to both short-range order and compositional changes occurring in the vicinity of the silicate tetrahedra environment [31]. This IR band position is distinctive for a vitreous silica-based structure deposited by magnetron sputtering [35,36]. The supplemental bands peaking for both source material and thin film in the ≈2800 to 3100 cm −1 region appertain to various stretching vibrations of C-H bonds [37], and suggest the presence of ordinary carbonaceous residues on the samples' surface as result of measurement, handling, and/or storage in normal ambient conditions [38].…”
Section: Resultsmentioning
confidence: 99%