2003
DOI: 10.1063/1.1576492
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Submicron probes for Hall magnetometry over the extended temperature range from helium to room temperature

Abstract: We report on mesoscopic Hall sensors made from various materials and their suitability for accurate magnetization studies of submicron samples over a wide temperature range and, especially, at room temperature. Among the studied devices, the best stability and sensitivity have been found for Hall probes made from a high-concentration two-dimensional electron gas ͑HC-2DEG͒. Even at 300 K, such submicron probes can reliably resolve local changes in dc magnetic field of Ϸ1 G, which corresponds to a flux sensitivi… Show more

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Cited by 37 publications
(31 citation statements)
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“…DOI High-mobility two-dimensional electron systems (2DES) in III/V semiconductor heterostructures such as n-Al x Ga 1ÿx As=GaAs are the subject of continuing interest in fundamental investigations, as, e.g., integer and fractional quantum Hall effect, as well as devices in electronic applications, such as high-speed modulation-doped field effect transistors, or high-sensitivity Hall magnetometers for noninvasive nanoscale magnetic measurements and biological sensing; see, e.g., Refs. [1][2][3] and references therein.…”
mentioning
confidence: 99%
“…DOI High-mobility two-dimensional electron systems (2DES) in III/V semiconductor heterostructures such as n-Al x Ga 1ÿx As=GaAs are the subject of continuing interest in fundamental investigations, as, e.g., integer and fractional quantum Hall effect, as well as devices in electronic applications, such as high-speed modulation-doped field effect transistors, or high-sensitivity Hall magnetometers for noninvasive nanoscale magnetic measurements and biological sensing; see, e.g., Refs. [1][2][3] and references therein.…”
mentioning
confidence: 99%
“…The head is subsequently scanned using a nm-resolution piezoelectric stage with scan ranges from 10 to 100 mm. Similar sub-micron resolution measurement systems that have scanning capabilities [10] and that do not have scanning capabilities [11,12] have been previously demonstrated. Eliminating the media in the measurement process reduces the complexity of the measurement, allowing for a more direct measurement of MWW and a quantitative measurement of the magnetic field.…”
Section: Methodsmentioning
confidence: 76%
“…Hall sensors, with an active area of micron and submicron sizes, are fabricated from various metals (Au, Al) [5], alloys (NiFe) [6], (FePt) [7], semiconductors (InSb) [8], (InAs) [9], graphene [10] and carbon nanotubes [11]. Nevertheless, theses various types of materials are not compatible with high performance CMOS processes.…”
Section: Introductionmentioning
confidence: 99%