Arenes [C6H3R(TMS)(OTf); also called benzyne/aryne precursors] containing inter‐related leaving groups Me3Si (TMS) and CF3SO3(OTf) on the adjacent positions (1,2‐position) are generally converted to their corresponding aryne‐intermediates via the addition of fluoride anion (F−) and subsequent elimination of TMS and OTf groups. This reaction is believed to proceed via the formation of an anionic intermediate [C6H4(TMS‐F)(OTf)]−. The EDA‐NOCV analysis (EDA‐NOCV = energy decomposition analysis‐natural orbital for chemical valence) of over 35 such precursors of varied types have been reported to reveal bonding and stability of CArSi and COTf bonds. EDA‐NOCV showed that the nature of the CArSi bond of C6H3R(TMS)(OTf) can be expressed as both dative and electron sharing [CArSi, CAr→Si]. The CArOTf bond, on the other hand, can be described explicitly as dative [CAr←OTf]. The nature of CArSi bond of [C6H4(TMS‐F)(OTf)]− exclusively changes to covalent dative σ‐bond CAr→S(Me)3F on the attachment of F− to the TMS group of C6H4(TMS)(OTf). Introduction of σ‐electron withdrawing group (like OMe, NMe2, and NO2) to the ortho‐position of the TMS group of functionalized arynes C6H3R(TMS)(OTf) prefer to have a covalent dative σ‐bond (CAr→Si) over an electron‐sharing covalent σ‐bond (CArSi). If this σ‐electron withdrawing group is shifted from ortho‐position to meta‐ and para‐positions, then the preference for a dative bond decreases significantly, implying that the electronic effect on the nature of chemical bonds affects through bond paths. This effect dies with distance, similar to the well‐known inductive effect.