Substrate effect on texturized microstructures in NiCr thin films

Effect of Chromium Concentration on the Electrical Properties of NiCr Thin Films Resistor Deposited at Room Temperature by Magnetron Cosputtering Technique

“…From the compositional point of view, NiCr films constitutes different phases, namely ͑i͒ a ␥-Ni terminal solid solution with face-centered cubic ͑fcc͒ structure; ͑ii͒ an ␣-Cr terminal solid solution with body-centered cubic ͑bcc͒ structure, and a metastable phase with tetragonal structure. 7 From these different structures of Ni and Cr, the solid solution of NiCr can be changed from a crystalline structure to an amorphous structure with increasing chromium concentration in NiCr alloys. The variation of the structure by a variation of chromium concentration in the NiCr films can control the TCR value of the films.…”