In this study, synchrotron radiation X-ray diffraction
analysis
is used to investigate the initial growth dynamics of metal–organic
vapor-phase epitaxy-grown ZnO nanorods on c-Al2O3 substrates. A two-dimensional area detector with a grazing-incidence
geometry enables projected reciprocal space mapping (RSM) using coordinate
transformation of diffraction images. The projected RSM reveals multiple
heteroepitaxial relationships between ZnO and Al2O3, including the dominant relationship of ZnO(101̅0)∥Al2O3(21̅1̅0). Evolution of internal strain
is revealed by an additional study on diffraction images and θ–2θ scans. Surface
topology from atomic force microscopy estimates the growth rate, supported
by the Scherrer equation analysis of the θ–2θ diffraction.