Summary Abstract: Collisional energy transfer in noble gas/hydrogen plasmas

Krogh, Ole; Wicker, T. E.; Chapman, B. N.

doi:10.1116/1.573941

Cited by 8 publications

(3 citation statements)

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“…In (7), we did not include the process of electron impact dissociative excitation to form H (n = 3) level from hydrogen molecules. We found that the effect of the dissociative excitation, whose rate coefficient was reported in [25], is minor to be less than about 1% in comparison with the excitation from the atomic ground state under the present experimental condition.…”

Section: Principle Of the Optical Emission Spectroscopy Measuremenmentioning

confidence: 40%

“…Transition probabilities A 32 and A 31 are cited from [13], quenching coefficients q H 2 from [20] and q Ar from [21]. The cross sections to calculate the coefficients [25], for k exc H from [22] and for k exc Ar from [23]. We calculate the rate coefficients with the EEPF f ( ), which is calculated with the software BOLSIG+ [24] as explained in Section III-A.…”

Section: Principle Of the Optical Emission Spectroscopy Measuremenmentioning

confidence: 99%

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Excited State Distributions of Hydrogen Atoms in the Microwave Discharge Hydrogen Plasma and the Effect of Electron Energy Probabilistic Function

Shimizu

Kittaka

Nezu

et al. 2015

IEEE Trans. Plasma Sci.

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To understand the essentiality of the electron energy distribution function in a low-pressure discharge plasma, an experimental study is carried out on the diagnostics of microwave discharge hydrogen plasma with its discharge pressure ∼1 torr in a cylindrical quartz tube. The electron kinetic temperature and density are measured by a Langmuir double probe. Number densities of electronically excited states of hydrogen atoms are experimentally examined by an optical emission spectroscopic (OES) measurement of line intensities of the Balmer series. The rotational and vibrational temperatures are observed for the Fulcher-α band spectrum of hydrogen molecule to understand the approximate value to the neutral gas temperature. The number density of the ground state of hydrogen atom is also experimentally estimated from the actinometry measurement. The electron energy probabilistic function (EEPF) is numerically calculated as a solution to the Boltzmann equation. Number densities of excited hydrogen atoms are calculated with the collisional-radiative (CR) model with experimentally measured data as input parameters. It is found that the population densities of excited states of hydrogen atoms become about one order or much larger than those determined by OES measurement if we assume Maxwellian EEPF. The CR model with the EEPF as a solution to the Boltzmann equation theoretically reproduce the experimentally measured values very well.Index Terms-Collisional-radiative (CR) model, electron energy probabilistic function (EEPF), low-pressure hydrogen plasma, number density of excited H atoms, plasma spectroscopy, the Boltzmann equation for EEPF.

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Section: Principle Of the Optical Emission Spectroscopy Measuremenmentioning

confidence: 40%

Section: Principle Of the Optical Emission Spectroscopy Measuremenmentioning

confidence: 99%

Excited State Distributions of Hydrogen Atoms in the Microwave Discharge Hydrogen Plasma and the Effect of Electron Energy Probabilistic Function

Shimizu

Kittaka

Nezu

et al. 2015

IEEE Trans. Plasma Sci.

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“…Beside electron impact activation, Ar metastables (≥11.5 eV) also contribute to the transfer of energy to the molecules, that is, to the polymerizable gases. [56,57] Furthermore, the plasma-chemical reaction pathway of HMDSO activation involves a multistep mechanism via activated intermediates, including vibrational excitation followed by the removal of a -CH 3 group and opening of a Si-O bond. The activation energy for the overall reaction might thus slightly vary for the different possible pathways.…”

Section: Plasma Polymerizationmentioning

confidence: 99%

Plasma activation mechanisms governed by specific energy input: Potential and perspectives

Hegemann

2023

Plasma Processes & Polymers

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In a low‐temperature plasma, the electrons pick up energy from the electric field in collisions with atoms and molecules, gaining high kinetic energy that must be sufficient for ionizing reactions to sustain the plasma. For molecular gases, an average energy per heavy gas particle is thus available in the plasma, the specific energy input, yielding plasma activation by inelastic collisions. Following a distribution law, the probability for the activation mechanism can be described by an Arrhenius‐like equation. The potential of this approach is demonstrated on the basis of plasma polymerization and plasma CO2 conversion. For perspective, energy efficiencies are discussed as a function of conversion indicating the optimum that can be achieved by electron impact activation compared with additional ways of energy transfer, probably depending on certain constraints.

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Optical Diagnostic Techniques for Low Pressure Plasma Processing

Donnelly

1990

Plasma-Surface Interactions and Processing of Materials

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Summary Abstract: Collisional energy transfer in noble gas/hydrogen plasmas

Cited by 8 publications

References 0 publications

Excited State Distributions of Hydrogen Atoms in the Microwave Discharge Hydrogen Plasma and the Effect of Electron Energy Probabilistic Function

Excited State Distributions of Hydrogen Atoms in the Microwave Discharge Hydrogen Plasma and the Effect of Electron Energy Probabilistic Function

Plasma activation mechanisms governed by specific energy input: Potential and perspectives

Optical Diagnostic Techniques for Low Pressure Plasma Processing

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