Superhard coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N systems produced by vacuum-arc deposition from a separated flow

Abstract

Abstract-Multicomponent hard coatings based on nitrides of Si doped transition metals have been pro duced by vacuum-arc deposition with the use of a RF generator and separation of an ion-plasma flux. Physico mechanical and tribotechnical characteristics of coatings have been studied. The possibility of their use as efficient protective coatings has been shown. DOI: 10.3103/S1063457614010055Keywords: protective coatings, vacuum-arc deposition, nitrides of metals, cutting tools. INTRODUCTIONOne of the priority directions of the modern science and technology is the development of new materials on the basis of multicomponent alloys, nanocomposite coatings, and analysis of their physico mechanical and tribological characteristics [1,2].To produce multicomponent and multilayer coatings, the ion-plasma deposition methods are most used in the industry, in particular, magnetron sputtering [3] and vacuum arc deposition [4]. The use of ion-plasma methods makes it possible to produce multicomponent coatings of different materials by mixing plasma streams from several sources or by sputtering of a cathode, which contains various components in its compo sition. Of greatest scientific interest are the methods, the use of which makes possible the formation of multi component coatings by conventional devices with one cathode containing necessary components in required ratios. The advances of technologies of applying nanocomposite coatings by ion-plasma methods require a further improvement of the known sputtering systems and development of fundamentally new devices [5,6]. Synthesized multicomponent coatings have high operational characteristics due to the stabilities of the struc ture and composition, which are characterized by the minimum Gibbs energy.Of refractory compounds that demonstrate high functional characteristics nanocrystalline composites pro duced as interstitial solid solutions based on nitrides of titanium, zirconium, hafnium, silicon, etc. take up a special place [7,8].The aim of the present study was to develop superhard multicomponent nitride systems based on solid solu tions produced by sputtering all metal cathodes using a vacuum-arc deposition from a separated beam and RF low energy ion treatment and to study physico mechanical properties of the resulting coatings. The use of separated ion-plasma flux will make it possible to practically get rid of a drop fraction in the coatings formed.

Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering

“…Figure 6(b) shows the behaviour of the variation in mass during 300 cycles for the Ti6Al4V alloy. As shown in the graph, the generation of oxide layers was constant, which is associated with the movement of metal cations during the stage of oxide growth towards the outside, which generates voids that separate the oxide layer and the Ti6Al4V substrate [23–25]. It can be seen that the change in mass becomes greater as the number of thermal corrosion cycles increases, which indicates that the oxide layer has a certain protective behaviour [21,26].…”

Properties Evolution of Ion-plasma Coatings on the Base of Transition Metal Nitrides

“…Analysis of the data of X-ray diffraction studies [6][7][8] indicates the characteristic structural features of coatings formed from targets of identical composition. The properties of the coatings differ greatly depending on the separation application, pressure of the reaction gas and magnitude of the displacement potential.…”

“…Fragments of X-ray photographs illustrate the determination of the crystal lattice deformation of the (Ti-Hf-Si)N coating with separation by superimposing lines under oblique shooting conditions: for the sample (U  -100 V) a deformation of -1.9 % is observed (the lattice parameter a  0.4305 nm), and -1.6 % for the sample (bias potential of -200 V, a  0.4303 nm) [6][7][8]. Fig.…”

Influence of the high-temperature annealing on the structure and mechanical properties of vacuum–arc coatings from Mo/(Ti + 6 wt % Si)N

“…In the greatest degree this refers to coatings produced at the lowest working pressure p N = 6.0 × 10 -4 Torr (Fig. 1), at which because of a lower density of a gaseous medium and, accordingly, long length of the particles free path, the mean loss of the energy of particles vaporized from a cathode at their movement from the vaporizing cathode to the substrate is the lowest [22]. The analysis of the elemental composition showed that after a high temperature annealing the relative contents of the coating metal components did not practically change.…”